2-Ar共濺射Ti摻雜對Ta2O5涂層光學性能和力學性能的影響，采用射頻和直流磁控共濺射技術(shù)在玻璃基底表面制備了Ta2O5、N2-Ta2O5、Ti-Ta2O5和N2-Ti-Ta2O5涂層。利用X射線衍射儀（XRD）、掃描電子顯微鏡（SEM）、原子力顯微鏡（AFM）表征了Ta2O5、N2-Ta2O5、Ti-Ta2O5和N2-Ti-Ta2O5涂層的微觀結(jié)構(gòu)和表面形貌；通過紫外可見分光光度計測試了涂層的光學參數(shù)；采用納米壓痕儀測試了涂層的硬度和楊氏模量。XRD測試結(jié)果表明，Ta2O5、N2-Ta2O5、Ti-Ta2O5和N2-Ti-Ta2O5涂層主要以Ta2O5為主體的非晶相結(jié)構(gòu)組成。SEM和AFM結(jié)果顯示，沉積在玻璃基底上的涂層未出現(xiàn)大面積空隙，濺射粒子在基底表面均勻堆積生長，并且涂層沉積厚度基本一致，厚度誤差在5%以內(nèi)。分別引入N2和Ti及N2-Ti共摻雜，均可降低Ta2O5涂層的粗糙度。光學測試結(jié)果表明，分別引入N2和Ti元素，可以提高Ta2O5涂層的平均透射率至81%以上，而N2-Ti共摻雜制備的N2-Ti-Ta2O5涂層平均透射率降低。力學測試結(jié)果顯示，與Ta2O5涂層對比，N2-Ta2O5和N2-Ti-Ta2O5涂層的硬度顯著增大，Ti-Ta2O5涂層硬度基本一致。彈性指數(shù)（H/E）和塑性指數(shù)（H3/E2）表明，N2-Ta2O5涂層和N2-Ti-Ta2O5涂層具備更好的斷裂韌性和抗塑性變形能力。在玻璃表面制備Ta2O5摻雜N2和Ti元素的涂層，可以實現(xiàn)以N2-Ta2O5涂層和N2-Ti-Ta2O5涂層為代表的、同時具備優(yōu)異光學性能和力學性能的多功能涂層。;In order to explore the effects of Ti doping on the optical and mechanical properties of Ta2O5 coatings prepared by Ar/N2-Ar co-sputtering, Ta2O5, N2-Ta2O5, Ti-Ta2O5, and N2-Ti-Ta2O5 coatings were prepared on the glass substrate surface by radio frequency and direct current magnetron co-sputtering techniques. The microstructures and surface morphologies of Ta2O5, N2-Ta2O5, Ti-Ta2O5, and N2-Ti-Ta2O5 coatings were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), and atomic force microscope (AFM). The optical parameters of the coatings were tested by ultraviolet-visible spectrophotometry. The hardness and Young's modulus of the coatings were tested by nanoindentation. XRD test results show that the Ta2O5, N2-Ta2O5, Ti-Ta2O5, and N2-Ti-Ta2O5 coatings mainly consist of amorphous phase structure with Ta2O5 as the main body. SEM and AFM results show that the coatings deposited on the glass substrate do not have extensive voids. The sputtered particles are uniformly piled and grow on the substrate surface. The coating thicknesses are basically the same and the thickness error is within 5%. The separate introduction of N2, Ti, and N2-Ti co-doping can reduce the roughness of Ta2O5 coatings. The optical test results show that the separate introduction of N2 and Ti element can increase the average transmittance of Ta2O5 coatings to more than 81%, whereas the average transmittance of N2-Ti-Ta2O5 coatings prepared by N2-Ti co-doping reduces. Mechanical test results show that compared with that of Ta2O5 coating, the hardness of N2-Ta2O5 and N2-Ti-Ta2O5 coatings increases significantly. The hardness of Ti-Ta2O5 coatings is basically the same. The elasticity index (H/E) and plasticity index (H3/E2) indicate that the N2-Ta2O5 and N2-Ti-Ta2O5 coatings possess better fracture toughness and plastic deformation resistance. The preparation of N2- and Ti-doped Ta2O5 coatings on glass surface can obtain the multifunctional coatings with both excellent optical and mechanical properties, which is represented by N2-Ta2O5 and N2-Ti-Ta2O5 coatings."/>
2-Ti-Ta2O5;涂層;光學性能;力學性能;magnetron sputtering;N2-Ti-Ta2O5;coating;optical properties;mechanical properties"/>