Abstract:In order to verify the wear resistance and erosion resistance of Ti-doped Ta2O5 coating (TTO), a series of TTO coatings were prepared by magnetron sputtering technology by controlling the power of Ti target. The growth structure, microstructure and tribological properties of TTO coatings with Ti target power were studied. After the erosion test, the variation of erosion damage behavior of TTO coatings with mechanical properties under different erosion conditions was further studied. The results show that the TTO coatings eliminates the roughness, voids and defects in the material due to the mobility of the adsorbed atoms during the growth process, and a flat and dense smooth surface is obtained. Tribological tests show that the TTO coatings is mainly characterized by plastic deformation and micro-crack wear mechanism. Higher Ti target power can improve the wear resistance of TTO coatings. The results of the erosion test show that the impact crater, furrow, micro-cutting, brittle spalling and crack formation are the main wear mechanisms of the TTO coatings samples under erosion.