2Cu3O7-δ (YBCO) film with high quality in MOCVD technique, and a practicalSSwaySis needed to evaluate the thermal stability of metal precursors in evaporation. In this work, the thermal properties and decomposition kinetics of three precursors with different evaporation characteristics (Y(DPM)3, Cu(DPM)2, Ba(DPM)2) were comparatively investigated by non-isothermal thermogravimetric analysis, and the apparent activation energy (Ea) of evaporation process was evaluated by the Ozawa, Kissinger and Friedman methods. The results show that the decomposition reaction of Ba(DPM)2 is indeed concomitant with its evaporation process and highly sensitive to the change of temperature. In addition, the consistent results from TGA-DSC and the kinetic analysis can also confirm that evaporation kinetics study is suitable for investigating the thermostability of metal-organic compound in MOCVD process."/>

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Evaluating the Thermostability of Metal Precursors in MOCVD by the Reaction Kinetic Analysis
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School of Electrical Engineering,Beijing Jiaotong University

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National Key Research and Development Program (2017YFB0902302), National Natural Science Foundation of China (51477165) and Fundamental Research Funds for the Central Universities (2017RC009).

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    Abstract:

    The sufficient and stable evaporation of metal precursors is crucial to obtain reproducible YBa2Cu3O7-δ (YBCO) film with high quality in MOCVD technique, and a practicalSSwaySis needed to evaluate the thermal stability of metal precursors in evaporation. In this work, the thermal properties and decomposition kinetics of three precursors with different evaporation characteristics (Y(DPM)3, Cu(DPM)2, Ba(DPM)2) were comparatively investigated by non-isothermal thermogravimetric analysis, and the apparent activation energy (Ea) of evaporation process was evaluated by the Ozawa, Kissinger and Friedman methods. The results show that the decomposition reaction of Ba(DPM)2 is indeed concomitant with its evaporation process and highly sensitive to the change of temperature. In addition, the consistent results from TGA-DSC and the kinetic analysis can also confirm that evaporation kinetics study is suitable for investigating the thermostability of metal-organic compound in MOCVD process.

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[Teng Zhang, Shaotao Dai, Tao Ma, Lei Hu, Bangzhu Wang. Evaluating the Thermostability of Metal Precursors in MOCVD by the Reaction Kinetic Analysis[J]. Rare Metal Materials and Engineering,2019,48(12):3824~3828.]
DOI：10.12442/j. issn.1002-185X.20180564

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History
  • Received:May 30,2018
  • Revised:June 04,2018
  • Adopted:July 27,2018
  • Online: January 07,2020
  • Published: