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Y₂O₃:Eu(5％), Li(x％) thin film phosphor was fabricated via electro-deposited method. The microstructure and luminescent properties were also investigated for all samples. It is found that the Li addition is helpful for the formation of flower morphology and can enhance the photoluminescence intensity, and the optimal Li content is 15％ for Y₂O₃:Eu(5％), Li(x％). At the same time, during the deposition processing, the dependence of the morphology and luminescent properties for Y₂O₃:Eu(5％), Li(x％) thin film on deposition time and solution concentration are also studied.