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Palladium/ferrum(Pd/Fe)film was deposited on the surface of 316L stainless steel by vacuum arc deposition technique followed by vacuum heat treatment.Effects of vacuum heat treatments on the morphology and phase constitution of Pd/Fe films were investigated.The results show that Even Pd/Fe film can be deposited on the surface of 316L stainless steel by vacuum arc deposition,and the diffuse heat treatment techniques have significant effects on the morphology and phase constitution of Pd/Fe film.Certain Pd-Fe alloy phase was formed through interdiffusion between Pd film and Fe film after treatment by 900 degrees centigrade for one hour.Along with the temperature increment of the diffuse heat treatment,the diffusion distance of Pd and Fe film into the 316L matrix increase,where as amount of chromium and nickel of the matrix diffused outwards to the films also increase.