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CeO2 superfine powder was well prepared by laser heating gas-evaporation method with a 150 W CW CO2 laser as light source and Ce2(CO3)3 as targets. All the effects of process reaction parameters on products have been well researched. Measurements such as XRD, TEM were used to characterize the superfine particles. The obtained results show that many parameters such as the laser power density, reaction pressure, sort and rate of airflows affect the size and morphorlogy of nanoparticles. The size of the particle changes within 50 nm-80 nm in Ar atmosphere, and 10 nm-20 nm in deoxidization atmosphere of H2.