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The compound fraction of target surface was gotten from the rate equation s of sputtering and the transport equations of reactive particles .All of these equations are expressed by the constructional parameters of the chamber and macroscopic technology parameters.The calculating results from the TiN thin films deposited by reactive sputtering are well fit with the experim ental data.The methodes pro-vided in this paper will be benefit to the implementation of technology op timum as a new engineering methodes.