2薄膜、Ti摻雜WS2復(fù)合薄膜和La-Ti摻雜WS2復(fù)合薄膜。分析了薄膜的微觀形貌、成分、硬度和摩擦學(xué)性能。結(jié)果表明，與純WS2薄膜和Ti/WS2復(fù)合薄膜相比，La-Ti/WS2復(fù)合薄膜的微觀結(jié)構(gòu)更加致密。La-Ti/WS2復(fù)合薄膜的硬度H和彈性模量E也顯著提高。此外，La-Ti/WS2復(fù)合薄膜的摩擦系數(shù)減小，并且H/E比值增大，La-Ti/WS2復(fù)合薄膜的磨損率降低。結(jié)果表明，La的摻雜有助于在摩擦接觸表面形成穩(wěn)定的轉(zhuǎn)移膜，提高La-Ti/WS2復(fù)合薄膜的耐磨性和承載能力。;The solid lubrication films with high hardness and low friction coefficient should be developed to satisfy the severe working conditions of mechanical rotating parts of spacecraft. The pure WS2 film, Ti doped WS2 composite film (Ti/WS2) and La-Ti doped WS2 composite film (La-Ti/WS2) were prepared by unbalanced magnetron sputtering. The micro morphology, composition, hardness and tribological performance of the films were examined. Results show that compared with pure WS2 films and Ti/WS2 composite films, the microstructure of La-Ti/WS2 composite film becomes more compact. Meanwhile, the hardness and elastic modulus of La-Ti/WS2 composite film also increase significantly. Furthermore, the friction coefficient of La-Ti/WS2 composite film decreases, and the hardness/elastic modulus (H/E) ratio of La-Ti/WS2 composite film increases, which suggests that the wear rate of La-Ti/WS2 composite film is reduced. It is indicated that La doping contributes to the formation of stable transfer film on the friction contact surface, and thus improves the wear resistance and carrying capacity of La-Ti/WS2 composite film."/>
2復(fù)合薄膜;非平衡磁控濺射;減摩;耐磨;La-Ti/WS2 composite films;unbalanced magnetron sputtering;low friction;wear resistance"/>