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直流濺射沉積CrN薄膜組織結(jié)構(gòu)與摩擦性能分析研究
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江西理工大學 材料科學與工程學院,江西理工大學 材料科學與工程學院,江西理工大學 材料科學與工程學院,,,江西理工大學 材料科學與工程學院

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Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering
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School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou,Engineering Research of Center of High-efficiency Development and Application Technology of Tungsten Resources,Ministry of Education,Ganzhou,Engineering Research of Center of High-efficiency Development and Application Technology of Tungsten Resources,Ministry of Education,Ganzhou,School of Materials and Engineering,Jiangxi University of Science and Technology,Ganzhou

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    摘要:

    采用直流反應(yīng)濺射在304不銹鋼表面沉積CrN薄膜。利用X射線衍射儀（XRD），掃描電子顯微鏡（SEM），原子力顯微鏡（AFM），顯微硬度計，磨損試驗機與三維輪廓儀等表征氮氣流量對CrN薄膜組織結(jié)構(gòu)與摩擦性能的影響。研究結(jié)果表明，隨著氮氣流量的增加，CrN (200)晶面呈擇優(yōu)取向，薄膜的沉積速率隨著氮氣流量的增加逐漸降低。另外，薄膜的表面粗糙度隨著氮氣流量的增加呈先降低后增加的趨勢。隨著氮氣流量從15 sccm增加至30 sccm時，薄膜的顯微硬度先從527.34 HV增加至1042.26 HV，當?shù)獨饬髁吭僭黾又?5 sccm時，薄膜的顯微硬度卻降低至918 HV。磨損試驗表明，當?shù)獨饬髁繛?0 sccm 時薄膜具有最小的摩擦系數(shù)0.93和磨損率2.02×10-15m3·(N·m)-1，顯示最佳的磨損性能。

    Abstract:

    CrN films were deposited on 304 stainless steel by DC reactive magnetron sputtering. The effects of nitrogen flow on the microstructure, mechanical and tribological properties were characterized by X-ray diffraction, scanning electron microscopy, atom force microscope, microhardness, wear tester and Nanomap 500LS profile. The results showed that with the increase of nitrogen flow, the CrN films exhibited a preferential orientation in the (200) direction. The deposition rate of CrN films decrease with the increase of nitrogen flow. Besides, the surface roughness exhibited the tendency of decrease first and then increase with further increase of nitrogen flow. As nitrogen flow increased from 15 to 30 sccm, microhardness was improved from 527.34 HV to 1042.26 HV, and then decrease to 918 HV when the nitrogen flow further increase to 35 sccm. Wear test showed that the CrN films deposited at nitrogen flow of 30 sccm was achieved lowest friction coefficient with 0.93 and wear rate with 2.02×10-15m3·(N·m)-1, which presented best wear resistance performance.

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任興潤,張欽英,黃柱,蘇偉,羊建高,陳顥.直流濺射沉積CrN薄膜組織結(jié)構(gòu)與摩擦性能分析研究[J].稀有金屬材料與工程,2018,47(8):2283~2289.[Ren Xingrun, Zhang Qinying, Huang Zhu, Su Wei, Yang Jiangao, Chen Hao. Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering[J]. Rare Metal Materials and Engineering,2018,47(8):2283~2289.]
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  • 收稿日期:2017-01-08
  • 最后修改日期:2017-06-07
  • 錄用日期:2017-06-26
  • 在線發(fā)布日期: 2018-10-17
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