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利用FCVA法和CO2、N2制備Ti(C,O,N)納米復(fù)合薄膜的研究
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北京師范大學(xué),,,,,北京師范大學(xué),

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國(guó)家自然科學(xué)基金項(xiàng)目（面上項(xiàng)目，重點(diǎn)項(xiàng)目，重大項(xiàng)目）


The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors
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Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center

Fund Project:

The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan)

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    摘要:

    使用CO2和N2利用磁過濾陰極弧法（FCVA）在Si（100）和304不銹鋼上沉積Ti(C,N,O)薄膜。采用XPS, XRD, Raman, SEM, 摩擦磨損試驗(yàn)機(jī)，電化學(xué)實(shí)驗(yàn)站檢測(cè)得出氣體流速對(duì)薄膜成分、相結(jié)構(gòu)和薄膜性能的作用。當(dāng)混合氣體流量從10sccm升高的50sccm時(shí)，薄膜中的C和N含量有明顯增加，而O和Ti含量有小幅下降；當(dāng)混合氣體流量從50sccm升高到80sccm時(shí)，薄膜中的C和N含量下降，而Ti含量有小幅上升，O含量急劇上升。薄膜由nc-Ti(C,N,O)納米晶結(jié)構(gòu)，轉(zhuǎn)變?yōu)閚c-Ti(C,N,O)/a-CNx，a-TiO2/a-CNx,N-doped a-TiO2/a-C納米復(fù)合結(jié)構(gòu)。N-doped a-TiO2/a-C納米復(fù)合結(jié)構(gòu)薄膜具有最低的摩擦系數(shù)（0.34），nc-Ti(C,N,O)/a-CNx，N-doped a-TiO2/a-C納米復(fù)合結(jié)構(gòu)薄膜在Hanks溶液中均表現(xiàn)出良好的抗腐蝕能力。

    Abstract:

    Ti(C,N,O) films were deposited on Si (100), 304 stainless steel by Filtered Cathodic Vacuum Arc (FCVA) using CO2 and N2 (with ratio of 1:1) as precusors. The effect of gas flow rate on the composition, phase structure and properties of films was investigated by XPS, XRD, Raman, SEM, Tribological Test and Electrochemical workstation. The contents of C and N increase obviously, while contents of O and Ti decrease slightly as the gas flow rate increasing from 10sccm to 50sccm. The contents of C and N decrease, while content of Ti increases slightly and content of O increases dramatically as the gas flow rates from 50sccm to 80sccm. The phase structure of Ti(C,N,O) films transformed from nc-Ti(C,N,O) nanocrystal structure to nc-Ti(C,N,O)/a-CNx nanocomposite structure, a-TiO2/a-CNx and N-doped a-TiO2/a-C nanocomposite structure as gas flow rate increasing from 10sccm to 80sccm. The N-doped a-TiO2/a-C nanocomposite showed the lowest friction coefficient. Both nc-Ti(C,N,O)/ a-CNx nanocomposite structure and N-doped a-TiO2/a-C nanocomposite structure showed good anticorrosion ability in Hanks balance solution.

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侯慶艷,沈永青,伏開虎,周晗,英敏菊,張旭,廖斌.利用FCVA法和CO2、N2制備Ti(C, O,N)納米復(fù)合薄膜的研究[J].稀有金屬材料與工程,2017,46(12):3606~3612.[Hou Qingyan, Shen Yongqing, Fu Kaihu, Zhou Han, Ying Minju, Zhang Xu, Liao Bin. The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors[J]. Rare Metal Materials and Engineering,2017,46(12):3606~3612.]
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  • 收稿日期:2016-10-17
  • 最后修改日期:2016-12-14
  • 錄用日期:2017-01-06
  • 在線發(fā)布日期: 2018-01-04
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