2; a-C; 復(fù)合膜; 機械性能; 脈沖激光沉積"/> 2組合靶,在硅基片上沉積不同碳質(zhì)量分?jǐn)?shù)的WSx/a-C復(fù)合膜。用能譜儀、掃描電子顯微鏡和X射線衍射儀對薄膜的成分、形貌和微觀組織進行了表征。采用納米壓痕儀、涂層附著力劃痕儀和球-盤式摩擦磨損試驗機對薄膜的硬度、結(jié)合力和大氣中(相對濕度50~55%)的摩擦學(xué)性能進行了測試。結(jié)果表明,薄膜的S/W比穩(wěn)定在2.0左右且形成了(002)擇優(yōu)取向的WS2相。隨著薄膜中碳質(zhì)量分?jǐn)?shù)的增加,薄膜的硬度在36.1%C時出現(xiàn)最高值,結(jié)合力隨之增大且在52.4%C時達到最高值,摩擦因數(shù)先降低后增加,在41.2%C時有最小值0.144。薄膜磨損率在(0.91~1.61)×10-15 m3N-1m-1范圍內(nèi)變化,36.1%C的WSx/a-C復(fù)合膜具有最佳耐磨性能。"/>

最新色国产精品精品视频,中文字幕日韩一区二区不卡,亚洲有码转帖,夜夜躁日日躁狠狠久久av,中国凸偷窥xxxx自由视频

+高級檢索
脈沖激光沉積WSx/a-C復(fù)合薄膜的結(jié)構(gòu)與摩擦學(xué)性能
DOI:
作者:
作者單位:

浙江工業(yè)大學(xué)材料與科學(xué)與工程學(xué)院,,,,,浙江工業(yè)大學(xué)材料科學(xué)與工程材料

作者簡介:

通訊作者:

中圖分類號:

基金項目:

國家自然科學(xué)基金資助項目(59493300);教育部博士點基金資助項目(9800462)


Microstructure and tribological properties of pulsed laser deposited WSx/a-C composite films
Author:
Affiliation:

College of materials science and engineering, Zhejiang University of Technology,,,,,College of materials science and engineering, Zhejiang University of Technology

Fund Project:

  • 摘要
    • |
  • 圖/表
    • |
  • 訪問統(tǒng)計
    • |
  • 參考文獻
    • |
  • 相似文獻
    • |
  • 引證文獻
    • |
  • 資源附件
    • |
  • 文章評論
    摘要:

    采用脈沖激光燒蝕石墨/WS2組合靶,在硅基片上沉積不同碳質(zhì)量分?jǐn)?shù)的WSx/a-C復(fù)合膜。用能譜儀、掃描電子顯微鏡和X射線衍射儀對薄膜的成分、形貌和微觀組織進行了表征。采用納米壓痕儀、涂層附著力劃痕儀和球-盤式摩擦磨損試驗機對薄膜的硬度、結(jié)合力和大氣中(相對濕度50~55%)的摩擦學(xué)性能進行了測試。結(jié)果表明,薄膜的S/W比穩(wěn)定在2.0左右且形成了(002)擇優(yōu)取向的WS2相。隨著薄膜中碳質(zhì)量分?jǐn)?shù)的增加,薄膜的硬度在36.1%C時出現(xiàn)最高值,結(jié)合力隨之增大且在52.4%C時達到最高值,摩擦因數(shù)先降低后增加,在41.2%C時有最小值0.144。薄膜磨損率在(0.91~1.61)×10-15 m3N-1m-1范圍內(nèi)變化,36.1%C的WSx/a-C復(fù)合膜具有最佳耐磨性能。

    Abstract:

    WSx/a-C composite films with various carbon contents were prepared on monocrystalline silicon substrate by ablating a set of graphite/WS2 combined targets with pulsed excimer laser. The composition, morphology, microstructure and chemical state of the films were characterized by energy disperse spectroscopy (EDS), scanning electron microscopy (SEM), X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS). The hardness, adhesion to substrate and tribological properties in air (RH=50~55%) of the films were evaluated by nano-indentation, scratch tester and ball-on-disk tribometer. The results show that the S/W ratio maintains a constant value about 2.0 and a WS2 phase with (002) preferred orientation is formed in the films. With increasing carbon content, the hardness peaks at 36.1%C, the adhesion increases and a maximum value is reached at 52.4%C, the friction coefficient decreases first and then increases and a minimum value 0.144 is reached at 41.2%C. The wear rate varies in the range of (0.91~1.61) ×10-15 m3N-1m-1 and the film with 36.1%C shows the best wear resistance.

    參考文獻
    相似文獻
    引證文獻
引用本文

楊芳兒,魯葉,張繼,林玲玲,常新新,鄭曉華.脈沖激光沉積WSx/a-C復(fù)合薄膜的結(jié)構(gòu)與摩擦學(xué)性能[J].稀有金屬材料與工程,2018,47(S2):177~181.[Fanger Yang, Ye Lu, Ji Zhang, Lingling Lin, Xinxin Chang, Xiaohua Zheng. Microstructure and tribological properties of pulsed laser deposited WSx/a-C composite films[J]. Rare Metal Materials and Engineering,2018,47(S2):177~181.]
DOI：[doi]

復(fù)制
文章指標(biāo)
  • 點擊次數(shù):
  • 下載次數(shù):
  • HTML閱讀次數(shù):
  • 引用次數(shù):
歷史
  • 收稿日期:2017-12-01
  • 最后修改日期:2017-12-01
  • 錄用日期:2018-02-01
  • 在線發(fā)布日期: 2018-11-01
  • 出版日期: