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新型高熱導(dǎo)率氮化鋁基微波衰減陶瓷研究
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1.中國科學(xué)院電子學(xué)研究所高功率微波源與技術(shù)重點(diǎn)實(shí)驗(yàn)室;2.中國科學(xué)院電子學(xué)研究所

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TM25

基金項(xiàng)目:

國家重點(diǎn)研發(fā)計(jì)劃(2018YFB1105200)；中國科學(xué)院國防科技創(chuàng)新基金(CXJJ-15S123)


Study on Aluminum Nitride Microwave Attenuation Ceramics with High Thermal Conductivity
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1.Key Laboratory of High Power Microwave Sources and Technologies,Institute of Electronics,Chinese Academy of Sciences;2.Precision Manufacturing Center,Institute of Electronics,Chinese Academy of Sciences

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    摘要:

    針對(duì)傳統(tǒng)氧化鈹基微波損耗陶瓷存在毒性大、一致性差和焊接難度大的問題,本文發(fā)展了一種環(huán)境友好型、高導(dǎo)熱率氮化鋁基的AlN-FeSiAl微波衰減陶瓷。該材料在AlN基體中添加FeSiAl,屬環(huán)境友好型材料。為獲得高熱導(dǎo)率和良好的電磁性能,開展了不同氮化鋁粉末、不同F(xiàn)eSiA粉末添加量以及燒結(jié)工藝對(duì)復(fù)合材料性能影響的研究。結(jié)果表明,采用日本東洋氮化鋁粉末、添加10wt%的FeSiAl量,在1650℃和85MPa下進(jìn)行真空熱壓燒結(jié),獲得了衰減性能優(yōu)異的微波衰減陶瓷,且材料熱導(dǎo)率達(dá)到88.2 W/(m.K),接近美國Ceradyne 公司AlN 基微波衰減陶瓷的熱導(dǎo)率水平。

    Abstract:

    To solve the problem of high toxicity and poor consistency of traditional beryllium oxide microwave attenuation ceramics, a kind of environment-friendly AlN-FeSiAl microwave attenuation ceramics based on aluminum nitride with high thermal conductivity was developed in this paper. The material is added FeSiAl to the AlN matrix and belongs to environment-friendly material. In order to obtain high thermal conductivity and good electromagnetic performance, the effects of different aluminum nitride powders, FeSiAl additive amount and sintering process on composite properties were studied. The results show that adopting Toyo aluminum nitride, adding 10 wt% FeSiAl, vacuum hot pressing sintering under 1650 ℃ and 85 MPa, the high attenuation performance of microwave attenuation ceramics is realized, and material thermal conductivity is 88.2 W/(m.K), close to that of the microwave attenuation ceramics based on aluminum nitride in Ceradyne company.

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引用本文

張永清,陰生毅,高向陽,李秀霞,金鶴,張連正.新型高熱導(dǎo)率氮化鋁基微波衰減陶瓷研究[J].稀有金屬材料與工程,2020,49(2):655~660.[Zhang Yongqing, Yin Shengyi, Gao Xiangyang, Li Xiuxia, Jin He, Zhang Lianzheng. Study on Aluminum Nitride Microwave Attenuation Ceramics with High Thermal Conductivity[J]. Rare Metal Materials and Engineering,2020,49(2):655~660.]
DOI：10.12442/j. issn.1002-185X. QH20190051

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  • 收稿日期:2019-04-03
  • 最后修改日期:2019-05-17
  • 錄用日期:2019-10-23
  • 在線發(fā)布日期: 2020-03-12
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