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氣體流量對LPCVD ZrC涂層結(jié)構(gòu)和沉積機(jī)理的影響
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1.中航復(fù)合材料有限責(zé)任公司;2.北京科技大學(xué)

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國家重點(diǎn)基礎(chǔ)研究發(fā)展計劃（2015CB655200）,國家自然科學(xué)基金項(xiàng)目（91216302）


Effect of Total Flow Rate on Morphology and Growth Mechanism of ZrC Coating Prepared by LPCVD
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1.AVIC COMPOSITE CORPORATION LTD;2.University of Science and Technology Beijing

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    摘要:

    摘要：利用低壓化學(xué)氣相沉積工藝，采用Zr-Br2-C3H6-H2-Ar反應(yīng)體系，在石墨基底表面制備了ZrC涂層。研究了氣體流量對ZrC涂層微觀形貌和沉積機(jī)理的影響。隨著氣體流量由200 ml/min向1000 ml/min增大，涂層的沉積速率先增大后減小，極大值為3.37 g-3?cm-2?h-1。同時，涂層的擇優(yōu)取向發(fā)生了明顯的變化，在600~800 ml/min范圍內(nèi)時，涂層具有穩(wěn)定且強(qiáng)烈的(200)晶面擇優(yōu)取向。XPS分析結(jié)果表明，沉積產(chǎn)物中的C/Zr比也隨氣體流量的增大，相應(yīng)的由0.85快速的升高到1.49。當(dāng)氣體流量為200 ml/min時，涂層致密光滑，ZrC晶粒具有典型的等軸晶結(jié)構(gòu)特征；當(dāng)氣體流量為400~800 ml/min時，涂層光滑平坦，ZrC晶粒具有規(guī)則的四面體結(jié)構(gòu)；當(dāng)氣體流量為1000 ml/min時，涂層表面存在著大量不規(guī)則的島狀、弓狀顆粒?；妆砻孢吔鐚雍穸鹊淖兓怯绊懲繉映练e過程的主要因素。

    Abstract:

    Abstract: Zirconium carbide (ZrC) coatings were deposited on graphite substrate at 1200°C by low pressure chemical vapor deposition (LPCVD) from the Zr-Br2-C3H6-H2-Ar system. The effect of total flow rate on the morphology and growth mechanism of ZrC coatings were investigated. As the total pressure increased, the deposition rate increased firstly and then decreased slowly, the maximum value was 3.37 g-3?cm-2?h-1. Meanwhile, the preferential orientation of ZrC coatings changed evidently, the (200) plane was the preferential orientation of ZrC coatings at the total flow rate of 600~800 ml/min. XPS showed that the C/Zr ratio of ZrC coatings increased from 0.85 to 1.49. At the total flow rate below 200 ml/min, the ZrC coatings were dense and composed of equiaxed gain structure. As the total flow rate increased from 400 to 800 ml/min, the ZrC coatings were well-faceted pyramidal-shaped crystals. When the total flow rate above 1000 ml/min, the ZrC coatings with a loose complex island-like gains. The variations of ZrC coatings can mainly be attributed to boundary layer with increasing the total flow rate.

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引用本文

馬新,何新波,梁艷媛,邱海鵬.氣體流量對LPCVD ZrC涂層結(jié)構(gòu)和沉積機(jī)理的影響[J].稀有金屬材料與工程,2020,49(2):589~594.[maxin, Hexinbo, Liangyanyuan, Qiuhaipeng. Effect of Total Flow Rate on Morphology and Growth Mechanism of ZrC Coating Prepared by LPCVD[J]. Rare Metal Materials and Engineering,2020,49(2):589~594.]
DOI：10.12442/j. issn.1002-185X. QH20190037

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  • 收稿日期:2019-03-21
  • 最后修改日期:2019-05-07
  • 錄用日期:2019-10-23
  • 在線發(fā)布日期: 2020-03-12
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