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沉積溫度對高性能TiAlN涂層微觀結(jié)構(gòu)和力學性能的影響
作者:
作者單位:

1.東北大學 機械工程與自動化學院;2.泰安東大新材表面技術(shù)有限公司

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基金項目:

國家自然科學基金(51775096);中央大學基本科研業(yè)務(wù)費專項資助項目(No.;N2003009);中國科學院- wego研究發(fā)展計劃([2007]006)。


Influence of Deposition Temperature on Microstructure and Mechanical Properties of TiAlN Coatings for High Performance Manufacture
Author:
Affiliation:

1.School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110004, China;2.NeuMat (Taian) Surface Technology Limited, Taian 271024, China

Fund Project:

National Natural Science Foundation of China (51775096); Central University Basic Research Fund of China (N2003009); Chinese Academy of Sciences-WEGO Research Development Plan

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    摘要:

    采用真空電弧離子鍍(AIP)技術(shù)在不同沉積溫度下TiAlN涂層,用于高性能制造,并研究了沉積溫度與表面性能的關(guān)系。結(jié)果表明,由于離子轟擊作用,表面大顆粒隨沉積溫度的升高而減少。隨著沉積溫度的升高,涂層表面的晶粒尺寸先急劇減小后逐漸增大。此外,沉積溫度對合成涂層的相組成和化學成分影響不大。隨著沉積溫度的升高,硬度和粘結(jié)強度先迅速增加,后逐漸降低。當沉積溫度在450 ℃左右時,沉積的TiAlN涂層硬度最高,粘結(jié)強度最大。上述現(xiàn)象的發(fā)生機理與沉積過程中表面與界面之間的微觀組織和殘余應(yīng)力的變化有關(guān)。合成的涂層在高達900 ℃的空氣中具有良好的熱穩(wěn)定性。

    Abstract:

    TiAlN coatings were deposited at various deposition temperatures using vacuum arc ion plating (AIP) for the high performance manufacture. The relationships between deposition temperatures and surface properties were investigated. Results show that surface macroparticles (MPs) decrease in number and size with increasing the deposition temperature because of ion bombardment. When deposition temperature increases, the grain size on the top coating first decreases sharply, and then increases gradually. Furthermore, deposition temperature has little influence on the phase constituents and chemical compositions of the resultant coatings. With raising the deposition temperature, the hardness and adhesion strength first increase rapidly, and then decrease gradually. The deposited TiAlN coating exhibits the highest hardness and the strongest adhesion strength when deposition temperature is set at around 450 °C. The mechanism of the above phenomena is attributed to the variations of microstructure and residual stress between the surface and interface during the deposition process. The resultant coatings have a good thermal stability in air at temperatures up to 900 °C.

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劉興龍,徐乘遠,陳彬,喬宏,藺增.沉積溫度對高性能TiAlN涂層微觀結(jié)構(gòu)和力學性能的影響[J].稀有金屬材料與工程,2023,52(6):2024~2030.[Liu Xinglong, Xu Chengyuan, Chen Bin, Qiao Hong, Lin Zeng. Influence of Deposition Temperature on Microstructure and Mechanical Properties of TiAlN Coatings for High Performance Manufacture[J]. Rare Metal Materials and Engineering,2023,52(6):2024~2030.]
DOI:10.12442/j. issn.1002-185X. E20220041

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歷史
  • 收稿日期:2022-12-05
  • 最后修改日期:2023-02-04
  • 錄用日期:2023-02-14
  • 在線發(fā)布日期: 2023-07-03
  • 出版日期: 2023-06-30