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沉積時間和靶電流比例對磁控濺射TiAlN涂層耐磨性的影響研究
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華南理工大學機汽學院,華南理工大學機汽學院,華南理工大學機汽學院,華南理工大學機汽學院,華南理工大學機汽學院,華南理工大學機汽學院

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國家自然科學基金項目(面上項目,重點項目,重大項目)


Research on Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of Magnetron Sputtering TiAlN Coating
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Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,School of Mechanical and Automotive Engineering, South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology

Fund Project:

National Nature Science Foundation of China (No.51275180),major state basic research development program (973) (2011CB710703),F(xiàn)undamental Research Funds for the Central Universities, SCUT(2013ZZ017)

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    摘要:

    采用磁控濺射工藝在WC-8Co硬質(zhì)合金基體表面制備了一層厚度分別為2.5μm、3μm和3.5μm的TiAlN涂層,并制備了不同Ti、Al比例的TiAlN涂層,利用摩擦磨損機考察了涂層的承載能力和摩擦學性能,通過掃描電子顯微鏡觀察了磨損試件的表面形貌,通過摩擦系數(shù)和顯微組織的演變來評價不同成分和不同厚度TiAlN涂層的摩擦學性能。結(jié)果表明,隨著涂層厚度的增加,涂層的摩擦系數(shù)降低,涂層更不易被磨穿,表明在一定范圍內(nèi)增加涂層厚度有利于提高涂層的耐磨損性能;涂層的成分發(fā)生改變時,由于Ti、Al元素的共同作用,呈現(xiàn)不同的摩擦性能,當TiAl比例為50:50時,涂層的耐磨性最好。

    Abstract:

    A TiAlN coating on the surface of a WC-8Co cemented carbide matrix with thicknesses ranging from 2.5 to 3.5 μm and different ratios of TiAl composition was manufactured by means of magnetron sputtering. The carrying capacity and tribological properties of the coating were investigated on a friction-wear testing machine; the microstructure of the coating was observed by using scanning electron microscopy. The tribiological properties of TiAlN coatings of different composition and thickness were evaluated through the friction coefficient and the evolution of microstructure. The results show that when the coating thickness increases, the friction coefficient decreases, and the coating will not easily wear out, suggesting that it is beneficial to improve the wear resistance of a coating by increasing its thickness in a certain range. If the composition of the coating changes, its friction performance will vary due to the different effects of Ti and Al. is 50:50, the wear resistance of the coating is best.

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湯勇,馬博,劉彬,袁偉,余彬海,陸龍生.沉積時間和靶電流比例對磁控濺射TiAlN涂層耐磨性的影響研究[J].稀有金屬材料與工程,2016,45(12):3057~3061.[Yong Tang, Bo MA, bin liu, Wei Yuan, Binhai Yu, Longsheng Lu. Research on Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of Magnetron Sputtering TiAlN Coating[J]. Rare Metal Materials and Engineering,2016,45(12):3057~3061.]
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  • 收稿日期:2015-10-30
  • 最后修改日期:2016-04-19
  • 錄用日期:2016-04-27
  • 在線發(fā)布日期: 2017-02-06
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