2O5涂層;組織結(jié)構(gòu);摩擦學(xué)特性;沖蝕行為;損傷規(guī)律"/> 2O5涂層(TTO)的耐磨特性和抗沖蝕性能,采用磁控濺射技術(shù)通過控制Ti靶功率制備了一系列TTO涂層。主要研究了TTO涂層隨Ti靶功率的生長結(jié)構(gòu)、組織形貌、摩擦學(xué)特性。進(jìn)一步研究了沖蝕試驗后,TTO涂層在不同沖蝕條件下,沖蝕損傷行為隨力學(xué)特性的變化規(guī)律。結(jié)果表明,TTO涂層在生長過程中由于吸附原子的遷移率消除了材料中的粗糙度、空隙和缺陷, 獲得了平整致密的光滑表面。摩擦學(xué)試驗表明,TTO涂層主要表現(xiàn)為塑性變形和微裂紋的磨損機制。較高的Ti靶功率可以提升TTO涂層的耐磨性。沖蝕試驗結(jié)果表明,沖擊坑、犁溝、微切削、脆性剝落和裂紋的形成為TTO涂層樣品在沖蝕作用下的主要磨損機制。"/>

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Ti摻雜Ta2O5高透光涂層抗沖蝕性能及損傷演變研究
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作者單位:

1.合肥工業(yè)大學(xué)機械工程學(xué)院;2.河南科技大學(xué)機電工程學(xué)院

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National Key R&D Program of China (2021YFB3400401)


Study on erosion resistance and damage evolution of Ti-doped Ta2O5 high transmittance coatings
Author:
Affiliation:

1.School of Mechanical Engineering,Hefei University of Technology;2.School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang

Fund Project:

National Key R&D Program of China (2021YFB3400401)

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    摘要:

    為了驗證Ti摻雜Ta2O5涂層(TTO)的耐磨特性和抗沖蝕性能,采用磁控濺射技術(shù)通過控制Ti靶功率制備了一系列TTO涂層。主要研究了TTO涂層隨Ti靶功率的生長結(jié)構(gòu)、組織形貌、摩擦學(xué)特性。進(jìn)一步研究了沖蝕試驗后,TTO涂層在不同沖蝕條件下,沖蝕損傷行為隨力學(xué)特性的變化規(guī)律。結(jié)果表明,TTO涂層在生長過程中由于吸附原子的遷移率消除了材料中的粗糙度、空隙和缺陷, 獲得了平整致密的光滑表面。摩擦學(xué)試驗表明,TTO涂層主要表現(xiàn)為塑性變形和微裂紋的磨損機制。較高的Ti靶功率可以提升TTO涂層的耐磨性。沖蝕試驗結(jié)果表明,沖擊坑、犁溝、微切削、脆性剝落和裂紋的形成為TTO涂層樣品在沖蝕作用下的主要磨損機制。

    Abstract:

    In order to verify the wear resistance and erosion resistance of Ti-doped Ta2O5 coating (TTO), a series of TTO coatings were prepared by magnetron sputtering technology by controlling the power of Ti target. The growth structure, microstructure and tribological properties of TTO coatings with Ti target power were studied. After the erosion test, the variation of erosion damage behavior of TTO coatings with mechanical properties under different erosion conditions was further studied. The results show that the TTO coatings eliminates the roughness, voids and defects in the material due to the mobility of the adsorbed atoms during the growth process, and a flat and dense smooth surface is obtained. Tribological tests show that the TTO coatings is mainly characterized by plastic deformation and micro-crack wear mechanism. Higher Ti target power can improve the wear resistance of TTO coatings. The results of the erosion test show that the impact crater, furrow, micro-cutting, brittle spalling and crack formation are the main wear mechanisms of the TTO coatings samples under erosion.

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葉博瑞,晁 瑞. Ti摻雜Ta2O5高透光涂層抗沖蝕性能及損傷演變研究[J].稀有金屬材料與工程,,().[Ye Borui, Chao Rui. Study on erosion resistance and damage evolution of Ti-doped Ta2O5 high transmittance coatings[J]. Rare Metal Materials and Engineering,,().]
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  • 收稿日期:2024-08-29
  • 最后修改日期:2024-11-14
  • 錄用日期:2024-11-18
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