-4 g/s)及較好的耐腐蝕性能(最小腐蝕電流密度1.0632×10-8 A·cm-2、最小腐蝕速率5.5226×10-5 mm·A-1)。"/>

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微觀結(jié)構(gòu)與應(yīng)力狀態(tài)對(duì)雙級(jí)HIPIMS沉積TiN鍍層服役性能的影響
作者:
作者單位:

1.西安理工大學(xué) 材料科學(xué)與工程學(xué)院,陜西 西安 710048;2.嘉善鑫海精密鑄件有限公司,浙江 嘉善314105

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基金項(xiàng)目:

Xi"an Science and Technology Plan Project(23GXFW0055), Shaanxi Provincial Natural Science Basic Research Program Project (2024JC-YBQN-0525) and NSFC(52001251).


Influence of Microstructure and Stress State on Service Performance of TiN Coatings Deposited by Dual-Stage HIPIMS
Author:
Affiliation:

1.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an710048, China;2.Jiashan Xinhai Precision Casting Co., Ltd, Jiashan314105, China

Fund Project:

Xi'an Science and Technology Plan Project (23GXFW0055); Shaanxi Provincial Natural Science Basic Research Program Project (2024JC-YBQN-0525); National Natural Science Foundation of China (52001251)

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    摘要:

    利用新型雙級(jí)高功率脈沖磁控濺射(HIPIMS)技術(shù)在不同沉積時(shí)間條件下制備TiN鍍層,分析不同鍍層生長(zhǎng)階段其微觀結(jié)構(gòu)與應(yīng)力狀態(tài)對(duì)鍍層力學(xué)、摩擦、耐腐蝕等服役性能的影響。結(jié)果表明,隨著沉積時(shí)間由30 min增加至120 min,TiN鍍層表面結(jié)構(gòu)均呈大小顆粒緊密摻雜的圓胞狀結(jié)構(gòu),始終保持沉積-結(jié)晶-生長(zhǎng)的原子堆積增厚機(jī)制;當(dāng)沉積時(shí)間由90 min(鍍層厚度3884 nm)增加至120 min(鍍層厚度4456 nm)時(shí),鍍層應(yīng)力狀態(tài)出現(xiàn)壓-拉轉(zhuǎn)變。當(dāng)沉積時(shí)間為90 min時(shí),TiN鍍層結(jié)構(gòu)致密且受到較小的壓應(yīng)力(-0.54 GPa),鍍層具有較高的硬度與彈性模量(27.5、340.2 GPa)、較好的摩擦學(xué)性能(平均摩擦系數(shù)0.52,最小磨損率1.68×10-4 g/s)及較好的耐腐蝕性能(最小腐蝕電流密度1.0632×10-8 A·cm-2、最小腐蝕速率5.5226×10-5 mm·A-1)。

    Abstract:

    TiN coatings were prepared by the novel dual-stage high power impulse magnetron sputtering (HIPIMS) technique under different deposition time conditions, and the effects of microstructure and stress state at different coating growth stages on the mechanical, tribological, and corrosion resistance performance of the coatings were analyzed. Results show that with the prolongation of deposition time from 30 min to 120 min, the surface structure of TiN coating exhibits a round cell structure with tightly doped small and large particles, maintaining the atomic stacking thickening mechanism of deposition-crystallization-growth. When the deposition time increases from 90 min to 120 min, the coating thickness increases from 3884 nm to 4456 nm, and the stress state of coating undergoes the compression-tension transition. When the deposition time is 90 min, TiN coating structure is dense and suffers relatively small compressive stress of -0.54 GPa. The coating has high hardness and elastic modulus, which are 27.5 and 340.2 GPa, respectively. Meanwhile, good tribological properties (average friction coefficient of 0.52, minimum wear rate of 1.68×10-4 g/s) and fine corrosion resistance properties (minimum corrosion current density of 1.0632×10-8 A·cm-2, minimum corrosion rate of 5.5226×10-5 mm·A-1) can also be obtained for the coatings.

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郝娟,王百川,丁郁航,楊超,蔣百靈,王梓毅,汪東紅,董丹.微觀結(jié)構(gòu)與應(yīng)力狀態(tài)對(duì)雙級(jí)HIPIMS沉積TiN鍍層服役性能的影響[J].稀有金屬材料與工程,2024,53(12):3299~3305.[Hao Juan, Wang Baichuan, Ding Yuhang, Yang Chao, Jiang Bailing, Wang Ziyi, Wang Donghong, Dong Dan. Influence of Microstructure and Stress State on Service Performance of TiN Coatings Deposited by Dual-Stage HIPIMS[J]. Rare Metal Materials and Engineering,2024,53(12):3299~3305.]
DOI:10.12442/j. issn.1002-185X.20240043

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  • 收稿日期:2024-01-23
  • 最后修改日期:2024-02-27
  • 錄用日期:2024-02-28
  • 在線發(fā)布日期: 2024-12-19
  • 出版日期: 2024-12-16