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面向功率器件封裝的納米銅燒結(jié)連接技術(shù)研究進(jìn)展
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國家自然科學(xué)(No.52205324),北京市教委-市基金聯(lián)合資助項(xiàng)目(No.KZ202210005005),國家自然科學(xué)(No.52075287)


Research Progress of Cu Nanoparticle Sintering Technology for Power Electronic Packaging
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    摘要:

    隨著第三代半導(dǎo)體SiC和GaN的快速發(fā)展,傳統(tǒng)的Si基器件用封裝材料已不能滿足功率器件在高功率密度和高溫環(huán)境下可靠服役的需求。納米銅燒結(jié)技術(shù)不僅能夠低溫連接、高溫服役,同時(shí)具有優(yōu)異的導(dǎo)熱、導(dǎo)電性能和相對(duì)于納米銀較低的成本,在功率器件封裝研究領(lǐng)域備受關(guān)注,納米銅焊膏成為最有潛力的耐高溫封裝互連材料之一。本文從納米銅焊膏的制備、影響燒結(jié)連接接頭性能的因素以及接頭的可靠性三個(gè)方面綜述了當(dāng)前納米銅燒結(jié)連接技術(shù)的研究進(jìn)展,闡明了納米銅顆粒的氧化行為及對(duì)應(yīng)措施,并重點(diǎn)論述了納米銅燒結(jié)連接接頭的高溫服役可靠性與失效機(jī)理,旨在促進(jìn)低成本的納米銅燒結(jié)連接技術(shù)在高性能、高可靠功率器件封裝中的應(yīng)用。

    Abstract:

    With the rapid development of the third-generation semiconductors SiC and GaN, traditional packaging materials such as Si-based lead-free solder cannot satisfied the requirements of high-power density and high-temperature loadings in power electronic devices any more. Nowadays, the joints packaged by Cu nanoparticle sintering technology could not only be bonded at low-temperature and serving at high-temperature, but also exhibit excellent thermal conductivity, electrical conductivity and relatively lower cost comparing to Ag nanoparticles. Thus, more and more attentions has been attracted in the field of Cu nanoparticle sintering technology using in power electronic packaging, which makes Cu nanoparticles become one of the most potential high-temperature-resistant packaging and interconnection materials. In this work, the current research progress of Cu nanoparticle sintered technology was summarized, including the fabrication of Cu nanoparticle pastes, the factors affecting the performance of sintered joints and the reliability of joints. Meanwhile, the oxidation behaviors as well as the anti-oxidation methods of Cu nanoparticle were introduced. Also, the high-temperature working reliability and failure mechanism of Cu nanoparticle sintered joints were discussed. This review was aimed at promoting the application of low-cost Cu nanoparticle sintering technology for high-performance and high-reliability power electronic packaging.

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馬立民,魯子怡,賈強(qiáng),王乙舒,張宏強(qiáng),周煒,鄒貴生,郭福.面向功率器件封裝的納米銅燒結(jié)連接技術(shù)研究進(jìn)展[J].稀有金屬材料與工程,2024,53(1):296~320.[Ma Limin, Lu Ziyi, Jia Qiang, Wang Yishu, Zhang Hongqiang, Zhou Wei, Zou Guisheng, Guo Fu. Research Progress of Cu Nanoparticle Sintering Technology for Power Electronic Packaging[J]. Rare Metal Materials and Engineering,2024,53(1):296~320.]
DOI:10.12442/j. issn.1002-185X.20230170

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  • 收稿日期:2023-03-31
  • 最后修改日期:2023-06-12
  • 錄用日期:2023-06-26
  • 在線發(fā)布日期: 2024-01-29
  • 出版日期: 2024-01-24