2,起到了改善涂層摩擦性能的作用。結(jié)論 在磁控濺射工藝中引入Ce元素,可以獲得摩擦學(xué)性能優(yōu)良的(AlCrNbTiVCe)N涂層。"/>

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稀土Ce共濺射沉積(AlCrNbTiVCe)N涂層的高溫摩擦學(xué)性能
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作者單位:

河南科技大學(xué)機(jī)電工程學(xué)院

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中圖分類號:

TG135+.6

基金項(xiàng)目:

國家重點(diǎn)研發(fā)計(jì)劃(2021YFB3400400);河南省科技攻關(guān)項(xiàng)目(202102210073)


High-temperature Tribological Properties of (AlCrNbTiVCe)N Coating Deposited by Co-sputtering Rare Earth Ce
Author:
Affiliation:

School of Mechatronics Engineering

Fund Project:

National key research and development program(2021YFB3400400); Project of Science and Technology Development of Henan Province (202102210073)

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    摘要:

    目的 研究稀土Ce與AlCrNbTiV高熵合金磁控共濺射(AlCrNbTiVCe)N涂層500 ℃下的摩擦學(xué)性能。方法 采用掃描電子顯微鏡(SEM)、X射線衍射儀(XRD)、X射線光電子能譜儀(XPS)表征涂層的表面形貌、成份、物相和價(jià)態(tài)。通過納米壓痕儀、球盤式摩擦磨損試驗(yàn)機(jī)和白光干涉三維形貌儀測試涂層的力學(xué)性能和摩擦學(xué)性能。結(jié)果 采用磁控濺射技術(shù)可以制備出性能良好的(AlCrNbTiVCe)N涂層,Ce的引入改善了涂層微觀組織和結(jié)構(gòu),增強(qiáng)了涂層的硬度,提高了涂層的抗塑性變形能力和抗彈性變形能力,進(jìn)而使涂層具有良好的摩擦磨損性能。在常溫下(AlCrNbTiVCe)N涂層的摩擦因數(shù)和磨損率與未含Ce的(AlCrNbTiV)N涂層相比均顯著降低,其磨損機(jī)制為輕微的磨粒磨損和粘著磨損;在500 ℃下(AlCrNbTiVCe)N涂層具有比常溫下更低的摩擦因數(shù),其磨損機(jī)制以氧化磨損為主,這是由于涂層表面存在CeO2,起到了改善涂層摩擦性能的作用。結(jié)論 在磁控濺射工藝中引入Ce元素,可以獲得摩擦學(xué)性能優(yōu)良的(AlCrNbTiVCe)N涂層。

    Abstract:

    The tribological properties of (AlCrNbTiVCe)N coating at 500 ℃ fabricated by co-sputtering of Ce and AlCrNbTiV alloy were investigated. Scanning electron microscopy (SEM), X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) were used to characterize the microstructure, composition and crystal structure of the coatings. The mechanical properties and tribologiccal properties of the coatings were tested by nano indentation, tribometer and white light interfering profilometer.The results show that the (AlCrNbTiVCe)N coatings were perfectly prepared by magnetron sputtering. The addition of Ce can improve the structure,and makes grains refined. Meanwhile,the addition of Ce markedly increases the hardness of coatings, which makes the coatings have excellently resistance to plastic deformation and elastic deformation,leading to considerably enhance the friction and wear properties of the coating.The friction coefficient and wear rate of (AlCrNbTiVCe)N coating are significantly lower than that of free Ce (AlCrNbTiV)N coating at room temperature, and the wear mechanism is slight abrasive wear and adhesive wear; at 500 ℃, the friction coefficient of (AlCrNbTiVCe)N coating is lower than that at room temperature, and wear mechanism is mainly oxidation wear. It is indicated that the introduction of Ce contributes to the formation of CeO2 on the coating surface, and thus improves the tribological properties of (AlCrNbTiVCe)N coatings.

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暢為航,雷賢卿,蔡海潮,薛玉君,李航.稀土Ce共濺射沉積(AlCrNbTiVCe)N涂層的高溫摩擦學(xué)性能[J].稀有金屬材料與工程,2023,52(2):527~534.[CHANG WeiHang, CAI Haichao, XUE Yujun, XUE Yujun, LI Hang. High-temperature Tribological Properties of (AlCrNbTiVCe)N Coating Deposited by Co-sputtering Rare Earth Ce[J]. Rare Metal Materials and Engineering,2023,52(2):527~534.]
DOI:10.12442/j. issn.1002-185X.20220513

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  • 收稿日期:2022-06-13
  • 最后修改日期:2022-08-01
  • 錄用日期:2022-08-12
  • 在線發(fā)布日期: 2023-03-09
  • 出版日期: 2023-02-28