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Al2O3鈍化層對(duì)a-IGZO薄膜晶體管電性能的增強(qiáng)機(jī)制研究
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西安交通大學(xué) 金屬材料強(qiáng)度國(guó)家重點(diǎn)實(shí)驗(yàn)室

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國(guó)家自然科學(xué)基金項(xiàng)目(面上項(xiàng)目,重點(diǎn)項(xiàng)目,重大項(xiàng)目)(51771144),陜西省自然科學(xué)基金項(xiàng)目(2019JLM-30、2019TD-020、2021JC-06)


The enhancement mechanism of Al2O3 passivation layer on the electrical properties of a-IGZO thin film transistors
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National Natural Science Foundation of China (51771144), Natural Science Foundation of Shaanxi Province (2021JC-06, 2019TD-020, 2019JLM-30)

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    摘要:

    非晶銦鎵鋅氧薄膜晶體管(a-IGZO TFT)具有高場(chǎng)效應(yīng)遷移率、高開(kāi)關(guān)比等優(yōu)點(diǎn),在主動(dòng)驅(qū)動(dòng)顯示技術(shù)、柔性和可穿戴電子器件領(lǐng)域具有巨大的應(yīng)用潛力。但其電學(xué)性能穩(wěn)定性差是制約大規(guī)模應(yīng)用的關(guān)鍵問(wèn)題。本文采用空心陰極增強(qiáng)脈沖激光沉積技術(shù)(HC-PLD)在室溫制備高質(zhì)量的Al2O3薄膜,作為a-IGZO TFT器件的鈍化層,顯著增強(qiáng)了Al2O3/a-IGZO TFT器件的亞閾值特性,其原因在于空心陰極引入的氧等離子體抑制了Al2O3/a-IGZO界面處氧空位的形成。進(jìn)一步研究發(fā)現(xiàn),針對(duì)a-IGZO薄膜的180 oC退火處理有利于消除弱結(jié)合氧并抑制深能級(jí)缺陷,提高載流子遷移率并降低閾值電壓漂移;而針對(duì)Al2O3/a-IGZO TFT器件進(jìn)行100 oC退火處理有助于消除其界面附近的氧空位,降低載流子濃度,改善亞閾值特性。結(jié)合兩步退火工藝所制備的Al2O3/a-IGZO TFT器件遷移率高達(dá)22.8 cm2V-1s-1,亞閾值擺幅為0.6 Vdecade-1,綜合電性能優(yōu)異。

    Abstract:

    Amorphous indium gallium zinc oxide thin film transistors (a-IGZO TFTs) have the advantages of high field effect mobility and high switching ratio, and thus exhibit great potential applications in the fields of active drive display technology, flexible and wearable electronic devices. However, the poor stability of the electronic performances is the key problem restricting its large-scale applications. In this paper, Al2O3 thin films with low oxygen vacancy content were prepared by hollow cathode assistant pulsed laser deposition at room temperature, and used as the passivation layer of a-IGZO TFT devices. In-depth X-ray photoelectron spectroscopy illustrates that oxygen plasma introduced by the hollow cathode inhibits the formation of oxygen vacancies at the Al2O3/a-IGZO interface, which could improve the subthreshold performances of the TFT devices. 180 oC annealing for a-IGZO films could improve the mobility and reduce the threshold voltage shift; Annealing at 100 oC for Al2O3/a-IGZO TFT devices is helpful to reduce the carrier concentration and improve the subthreshold characteristics. The mobility of TFT devices processed by these two combining annealing processes could be as high as 22.8 cm2V-1s-1, and the subthreshold swing is 0.6 Vdecade-1.

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王琛,曾超凡,路文墨,寧海玥. Al2O3鈍化層對(duì)a-IGZO薄膜晶體管電性能的增強(qiáng)機(jī)制研究[J].稀有金屬材料與工程,2023,52(6):2103~2110.[wangchen, zengchaofan, luwenmo, ninghaiyue. The enhancement mechanism of Al2O3 passivation layer on the electrical properties of a-IGZO thin film transistors[J]. Rare Metal Materials and Engineering,2023,52(6):2103~2110.]
DOI:10.12442/j. issn.1002-185X.20220427

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  • 收稿日期:2022-05-16
  • 最后修改日期:2022-09-13
  • 錄用日期:2022-10-21
  • 在線發(fā)布日期: 2023-07-07
  • 出版日期: 2023-06-30