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氮含量對(duì)直流磁控濺射(TiAlTaCrZr)N涂層力學(xué)及鈦合金切削性能影響研究
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1.東北大學(xué)材料電磁過程研究教育部重點(diǎn)實(shí)驗(yàn)室;2.沈陽和世泰通用鈦業(yè)有限公司

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國防基礎(chǔ)科研計(jì)劃項(xiàng)目(JCKY2020110C004)


Effect of Nitrogen Contents on Mechanical and Titanium Alloy Cutting Performance of (TiAlTaCrZr)N Coatings by DC Magnetron Sputtering
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Key Laboratory of Electromagnetic Processing of Materials Ministry of Education,Northeastern University

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    摘要:

    解決傳統(tǒng)刀具耐磨涂層導(dǎo)熱性差的問題。本文采用直流磁控濺射方法,在不同氮?dú)饬髁肯轮苽淞?TiAlTaCrZr)N涂層,研究了不同氮含量對(duì)涂層微結(jié)構(gòu)和硬度、結(jié)合力、導(dǎo)熱等性能的影響。隨著氮?dú)饬髁康脑黾?涂層中N含量增加,涂層微觀結(jié)構(gòu)會(huì)由納米晶向柱狀晶轉(zhuǎn)變。涂層的硬度從TiAlTaCrZr 涂層的11.0 GPa增加到5 SCCM氮流量時(shí)(TiAlTaCrZr)N 涂層的20.6 GPa。涂層在氮?dú)饬髁繛? SCCM時(shí)膜基結(jié)合力可達(dá)到130 N以上,之后隨著氮含量增加逐漸降低。(TiAlTaCrZr)N涂層的導(dǎo)熱性均優(yōu)于TiAlN涂層的導(dǎo)熱性,但隨著氮含量增加導(dǎo)熱性降低。(TiAlTaCrZr)N涂層的高導(dǎo)熱性、高結(jié)合力、高硬度等特性使其在鈦合金高速切削時(shí)切削距離比TiAlN涂層提高175%,這為鈦合金加工提供了一種新型耐磨涂層。

    Abstract:

    In order to solve the problem of poor thermal conductivity of traditional tool coatings with high wear resistance, the (TiAlTaCrZr)N coatings were prepared by DC magnetron sputtering under different nitrogen flow rates. The effects of different nitrogen contents on the microstructure, hardness, adhesion and thermal conductivity of the coatings were studied. With the increase of nitrogen flow rates, the content of N in the coatings increases, and the microstructure of the coatings changes from nanocrystalline to columnar crystal. The hardness of the coatings increases from 11.0 GPa of the TiAlTaCrZr coating to 20.6 GPa of the (TiAlTaCrZr)N coating with 5 SCCM nitrogen flow rate. The adhesion of the coating reaches to the value of 130 N when nitrogen flow is 5 SCCM, and then decreases gradually with the increase of nitrogen contents. The thermal conductivity of the (TiAlTaCrZr)N coating is better than that of the TiAlN coating, but the thermal conductivity decreases with the increase of nitrogen contents. Since the (TiAlTaCrZr)N coating have high thermal conductivity, high adhesion and high hardness, the cutting length of the (TiAlTaCrZr)N coating is 175% higher than that of the TiAlN coating for titanium alloy cutting. It provides a new tool coating with high wear resistance and high thermal conductivity for titanium alloy cutting.

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李超,杜菲菲,呂汶璋,李顯亮,李國建,王強(qiáng).氮含量對(duì)直流磁控濺射(TiAlTaCrZr)N涂層力學(xué)及鈦合金切削性能影響研究[J].稀有金屬材料與工程,2023,52(6):2141~2146.[Li Chao, Du Feifei, Lü Wenzhang, Li Xianliang, Li Guojian, Wang Qiang. Effect of Nitrogen Contents on Mechanical and Titanium Alloy Cutting Performance of (TiAlTaCrZr)N Coatings by DC Magnetron Sputtering[J]. Rare Metal Materials and Engineering,2023,52(6):2141~2146.]
DOI：10.12442/j. issn.1002-185X.20220399

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  • 收稿日期:2022-05-08
  • 最后修改日期:2022-07-30
  • 錄用日期:2022-08-11
  • 在線發(fā)布日期: 2023-07-07
  • 出版日期: 2023-06-30