中國(guó)工程物理研究院 材料研究所,四川 江油 621907
NSFC (21908210)
Institute of Materials, China Academy of Engineering Physics, Jiangyou 621907, China
Development and Authorized Exploration Project from CAEP (TCSQ2020106); National Natural Science Foundation of China (21908210)
廖益?zhèn)?蘇斌,法濤,尹安毅,路超.低能氬離子束對(duì)鈹?shù)目涛g[J].稀有金屬材料與工程,2023,52(5):1610~1615.[Liao Yichuan, Su Bin, Fa Tao, Yin Anyi, Lu Chao. Etching of Low Energy Argon Ion Beam on Beryllium[J]. Rare Metal Materials and Engineering,2023,52(5):1610~1615.]
DOI:10.12442/j. issn.1002-185X.20220337