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低能氬離子束對(duì)鈹?shù)目涛g
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中國(guó)工程物理研究院 材料研究所,四川 江油 621907

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NSFC (21908210)


Etching of Low Energy Argon Ion Beam on Beryllium
Author:
Affiliation:

Institute of Materials, China Academy of Engineering Physics, Jiangyou 621907, China

Fund Project:

Development and Authorized Exploration Project from CAEP (TCSQ2020106); National Natural Science Foundation of China (21908210)

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    摘要:

    研究了0~1000 eV的低能氬(Ar)離子束對(duì)Be的刻蝕。比較了多種不同的表面拋光方法,結(jié)果發(fā)現(xiàn)Ar離子束刻蝕能獲得高質(zhì)量的Be表面。隨著刻蝕的持續(xù)進(jìn)行,Be表面質(zhì)量逐漸提升,表面粗糙度在600 eV和100 mA的條件下刻蝕6 h后趨于穩(wěn)定,達(dá)到了0.63 μm。比較了白光干涉(WLI)和聚焦離子束(FIB)的測(cè)量方法,發(fā)現(xiàn)FIB測(cè)量法更適合Be刻蝕深度的測(cè)量。實(shí)驗(yàn)結(jié)果和理論計(jì)算表明,Be的濺射過程與其被Ar離子轟擊后的電離過程較為接近。采用第一電離能作為濺射閾值,獲得了Ar離子能量對(duì)Be濺射產(chǎn)額的影響規(guī)律,獲得了Be刻蝕速率隨Ar離子束流和濺射產(chǎn)額乘積的變化規(guī)律,為Be刻蝕的工程應(yīng)用奠定了基礎(chǔ)。

    Abstract:

    The etching of low energy argon (Ar) ion beam of 0–1000 eV on Be was investigated. Different surface polishing methods were compared. Results show that the high-quality Be surface can be obtained by Ar ion beam etching. With the etching proceeding, the Be surface quality is gradually improved, and the surface roughness becomes stable, reaching 0.63 μm after etching at 600 eV and 100 mA for 6 h. White light interferometer (WLI) and focused ion beam (FIB) measurement methods were compared. Results show that FIB measurement method is more suitable for measurement of Be etching thickness. The experiment results and theoretical calculations suggest that the Be sputtering process is similar to the ionization process of Be by Ar ion bombardment. The influence law of Ar ion energy on sputtering yield of Be can be obtained with the first ionization energy as the sputtering threshold, and the variation of Be etching rate with the product of Ar ion beam energy and sputtering yield is obtained, providing foundation for engineering application of Be etching.

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引用本文

廖益?zhèn)?蘇斌,法濤,尹安毅,路超.低能氬離子束對(duì)鈹?shù)目涛g[J].稀有金屬材料與工程,2023,52(5):1610~1615.[Liao Yichuan, Su Bin, Fa Tao, Yin Anyi, Lu Chao. Etching of Low Energy Argon Ion Beam on Beryllium[J]. Rare Metal Materials and Engineering,2023,52(5):1610~1615.]
DOI:10.12442/j. issn.1002-185X.20220337

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  • 收稿日期:2022-04-20
  • 最后修改日期:2022-10-06
  • 錄用日期:2022-10-21
  • 在線發(fā)布日期: 2023-05-31
  • 出版日期: 2023-05-29