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磁控濺射沉積銀薄膜/涂層的研究進展
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昆明貴金屬研究所稀貴金屬綜合利用新技術(shù)國家重點實驗室

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云南省國際合作計劃項目(2014IA037)、云南省創(chuàng)新團隊項目(2019HC024)。云南省科技廳科研院所技術(shù)開發(fā)研究專項 (2018DC004)


Research progress of silver films / coatings deposited by magnetron sputtering
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Affiliation:

State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals

Fund Project:

International Cooperation Program of Yunnan Province (2014IA037), Innovation Team Program of Yunnan Province (2019HC024), Technology Development Research Special Project of Scientific Research Institutes of Yunnan Science and Technology Department (2018DC004)

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    摘要:

    銀薄膜/涂層是一種在高新技術(shù)領(lǐng)域極具潛力的新材料,近年來在現(xiàn)代工業(yè)中得到了廣泛的應(yīng)用。采用磁控濺射制備的銀薄膜/涂層具有優(yōu)異的附著力,通過選擇相應(yīng)的沉積參數(shù)可以實現(xiàn)對銀薄膜/涂層微觀結(jié)構(gòu)及性能的調(diào)控。本文綜述了磁控濺射沉積銀薄膜/涂層的主要制備工藝,評述了銀薄膜/涂層在其主要應(yīng)用領(lǐng)域內(nèi)的研究進展,并對其未來的發(fā)展進行了展望。

    Abstract:

    Silver films / coatings is a kind of new material with great potential in the field of high and new technology, and has been extensively used in modern industry in recent years.SThe silver thin films/coatings prepared by magnetron sputtering have excellent adhesion. The microstructure and properties adjustment of silver thin films/coatings can be achieved by selecting appropriate deposition parameters.SIn this paper, the main preparation methods of silver thin films/coatings deposited by magnetron sputtering are summarized the research progress of silver thin films/coatings in its main application fields is reviewed, and the future development of silver thin films is prospected.

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寧哲達,王一晴,陳天天,譚志龍,聞明.磁控濺射沉積銀薄膜/涂層的研究進展[J].稀有金屬材料與工程,2022,51(12):4773~4782.[Ning Zheda, Wang Yiqing, Chen Tiantian, Tan Zhilong, Wen Ming. Research progress of silver films / coatings deposited by magnetron sputtering[J]. Rare Metal Materials and Engineering,2022,51(12):4773~4782.]
DOI：10.12442/j. issn.1002-185X.20220297

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  • 收稿日期:2022-04-11
  • 最后修改日期:2022-06-15
  • 錄用日期:2022-07-12
  • 在線發(fā)布日期: 2023-01-19
  • 出版日期: 2022-12-30