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激光鍍鋯/鈧鋇鋁酸鹽復(fù)合薄膜鈧型陰極的研究
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中國科學(xué)院空天信息創(chuàng)新研究院

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國家重點研發(fā)計劃(項目編號2018YB1105200)


Study on a New Scandate Cathode coated with Zr/ Scandium Barium Aluminate by Pulsed Laser Deposition
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Aerospace Information Research Institute

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The National Key Technologies R&D Program of China(2018YFB1105200)

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    摘要:

    鈧型陰極具有優(yōu)異的電子發(fā)射潛力,但同時也存在著發(fā)射均勻性和重復(fù)性差等共性問題。本文提出采用脈沖激光鍍膜技術(shù)在浸漬鈧型陰極表面沉積鋯/高活性鈧鋇鋁酸鹽復(fù)合疊層薄膜,以實現(xiàn)對其性能的改進(jìn)。實驗完成了陰極表面膜層的制備,陰極二極管電子發(fā)射性能測試,陰極表面光/熱發(fā)射電子顯微鏡觀察,以及激活陰極表面成分及其深度方向分布的俄歇電子顯微鏡分析。研究結(jié)果表明,覆膜鈧型陰極激活后,其表面Ba、Sc含量提升,獲得了約110 ~ 130 nm厚的活性層,陰極展現(xiàn)出良好的發(fā)射性能;同時,陰極的表面發(fā)射均勻性獲得明顯提升。

    Abstract:

    :Scandatecathodes have excellent electron emission properties, but they also have some problems such as emission non-uniformity and poor repeatability. To improve the performance of the cathodes, a method of depositing a kind of composite film on the surface of scandate cathode by Pulse Laser Deposition technology was proposed. The film was deposited using zirconium and high-active barium aluminate salt target alternately. In the paper, the coated scandate cathode was prepared, and its electron emission performance was tested. The photo/thermal emission electron microscopywasobserved, and auger electron spectroscopy analysis of the composition and its depth distributionof the cathode was also processed. The research results show that more Ba and Sc content were detected on the coated cathode surface after activation. An active layer with thickness of 110 ~ 130 nm was obtained. The cathode exhibits great emission performance. At the same time, the electron emission uniformity of the cathode is significantly improved.

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盧志鵬,陰生毅,張兆傳,任峰,呂昕平,王宇,高向陽,王欣欣,邯嬌.激光鍍鋯/鈧鋇鋁酸鹽復(fù)合薄膜鈧型陰極的研究[J].稀有金屬材料與工程,2022,51(1):341~348.[盧志鵬,Yin Shengyi, Zhang Zhaochuan, Ren Feng, Lv Xinping, Wang Yu, Gao Xiangyang, Wang Xinxin, Han Jiao. Study on a New Scandate Cathode coated with Zr/ Scandium Barium Aluminate by Pulsed Laser Deposition[J]. Rare Metal Materials and Engineering,2022,51(1):341~348.]
DOI:10.12442/j. issn.1002-185X.20210093

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  • 收稿日期:2021-01-31
  • 最后修改日期:2021-03-01
  • 錄用日期:2021-03-22
  • 在線發(fā)布日期: 2022-02-09
  • 出版日期: 2022-01-28