2;負(fù)載動(dòng)力學(xué)"/> 2，采用掃描電子顯微鏡、能譜儀、X射線衍射儀、BET比表面積法等對(duì)負(fù)載了TiO2的堇青石進(jìn)行表征，測(cè)定不同溫度下的負(fù)載速度。結(jié)果表明：負(fù)載了TiO2的堇青石主要由（211）及（200）取向的銳鈦礦TiO2組成，呈八面體和立方體形態(tài)，BET比表面積達(dá)78.80 m2·g-1，平均孔徑為9.80 nm，具有雙峰分布特征。負(fù)載過(guò)程為TiCl4及O2向堇青石基體擴(kuò)散吸附，TiCl4分解為Ti4+并在高氧勢(shì)下進(jìn)入基體晶格形成TiO2晶核，并經(jīng)過(guò)擇優(yōu)取向和外延式生長(zhǎng)，其負(fù)載沉積速率方程為，其中T為負(fù)載溫度，為氣相TiCl4的分壓。"/>

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堇青石表面化學(xué)氣相沉積二氧化鈦的負(fù)載機(jī)理及負(fù)載動(dòng)力學(xué)
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作者單位:

1.西南石油大學(xué) 新能源與材料學(xué)院，四川 成都 610500;2.西南化工研究設(shè)計(jì)院 工業(yè)廢氣再利用國(guó)家重點(diǎn)實(shí)驗(yàn)室，四川 成都 610225

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The State Key Laboratory of Industrial Vent Gas Reuse (SKLIVGR-SWPU-2020-04)


Loading Mechanism and Loading Kinetics of TiO2 on Cordierite Surface by Chemical Vapor Deposition
Author:
Affiliation:

1.School of New Energy and Materials, Southwest Petroleum University, Chengdu 610500, China;2.State Key Laboratory of Industrial Vent Gas Reuse, Southwest Research & Design Institute of Chemical Industry, Chengdu 610225, China

Fund Project:

Sponsored by State Key Laboratory of Industrial Vent Gas Reuse (SKLIVGR-SWPU-2020-04)

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    摘要:

    以酸蝕改性堇青石為基體，利用化學(xué)氣相沉積法（CVD）在基體上負(fù)載TiO2，采用掃描電子顯微鏡、能譜儀、X射線衍射儀、BET比表面積法等對(duì)負(fù)載了TiO2的堇青石進(jìn)行表征，測(cè)定不同溫度下的負(fù)載速度。結(jié)果表明：負(fù)載了TiO2的堇青石主要由（211）及（200）取向的銳鈦礦TiO2組成，呈八面體和立方體形態(tài)，BET比表面積達(dá)78.80 m2·g-1，平均孔徑為9.80 nm，具有雙峰分布特征。負(fù)載過(guò)程為TiCl4及O2向堇青石基體擴(kuò)散吸附，TiCl4分解為Ti4+并在高氧勢(shì)下進(jìn)入基體晶格形成TiO2晶核，并經(jīng)過(guò)擇優(yōu)取向和外延式生長(zhǎng)，其負(fù)載沉積速率方程為，其中T為負(fù)載溫度，為氣相TiCl4的分壓。

    Abstract:

    In order to explore the loading mechanism and loading kinetics of TiO2 on cordierite, the acid-etched cordierite was used as the matrix and the TiO2 loading test was conducted by the chemical vapor deposition (CVD) method. The scanning electron microscope, energy disperse spectroscope, X-ray diffraction, and Brunauer-Emmett-Teller (BET) specific surface area measurement were used to characterize the TiO2 on cordierite surface and determine the loading speed at different temperatures. The results show that the surface of modified cordierite with TiO2 mainly consists of (211)-oriented and (200)-oriented anatase-TiO2 which is the octahedron and cube with BET specific surface area of 78.80 m2·g-1, an average pore diameter of 9.80 nm, and a bimodal distribution. The loading process is the diffusion and adsorption of TiCl4 and O2 towards the cordierite matrix. TiCl4 decomposes and Ti4+ enters the matrix lattice under the high oxygen potential to form TiO2 nuclei. After the preferential orientation and epitaxial growth, the loading deposition rate equation is , where T is the loading temperature and is the partial pressure when TiCl4 is in the gas phase.

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楊眉,劉良文,鄭珩,盧靜祥,王靜怡.堇青石表面化學(xué)氣相沉積二氧化鈦的負(fù)載機(jī)理及負(fù)載動(dòng)力學(xué)[J].稀有金屬材料與工程,2022,51(3):778~782.[Yang Mei, Liu Liangwen, Zheng Heng, Lu Jingxiang, Wang Jingyi. Loading Mechanism and Loading Kinetics of TiO2 on Cordierite Surface by Chemical Vapor Deposition[J]. Rare Metal Materials and Engineering,2022,51(3):778~782.]
DOI：10.12442/j. issn.1002-185X.20210062

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  • 收稿日期:2021-01-21
  • 最后修改日期:2021-04-12
  • 錄用日期:2021-05-12
  • 在線發(fā)布日期: 2022-03-30
  • 出版日期: 2022-03-30