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單層聲表面波叉指換能器(SAW-IDT)結(jié)構(gòu)優(yōu)化設(shè)計
作者:
作者單位:

1.江蘇大學(xué) 土木工程與力學(xué)學(xué)院 高端裝備關(guān)鍵結(jié)構(gòu)健康管理國際聯(lián)合研究中心，江蘇 鎮(zhèn)江 212013;2.北卡羅萊納州立大學(xué) 機(jī)械與航空航天工程系，美國 羅利 27606

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基金項目:

國家自然科學(xué)基金項目（面上項目，重點(diǎn)項目，重大項目）


Structural Optimization Design for Single Layer Surface Acoustic Wave Interdigital Transducer (SAW-IDT)
Author:
Affiliation:

1.National Center for International Research on Structural Health Management of Critical Components, Faculty of Civil Engineering and Mechanics, Jiangsu University, Zhenjiang 212013, China;2.Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh 27606, US

Fund Project:

National Natural Science Foundation of China (11872191, 11520101001); Postgraduate Research & Practice Innovation Program of Jiangsu Province (KYCX20_3073)

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    摘要:

    為優(yōu)化單層聲表面波換能器的驅(qū)動性能，改善現(xiàn)有δ函數(shù)分析方法在計算過程中的不足之處，采用有限元仿真優(yōu)化方法對叉指式換能器的靜力學(xué)性能進(jìn)行了分析，研究了支路電極寬度w、電極間距s和基片厚度t對驅(qū)動性能的影響。仿真結(jié)果表明，當(dāng)w/t=0.7時，可以得到最佳應(yīng)變響應(yīng)；當(dāng)s/t＞3.2時，可以得到最大應(yīng)變。同時還得出了電極間距越小，驅(qū)動電壓越低的結(jié)論。根據(jù)仿真優(yōu)化結(jié)果制備了聲表面波叉指換能器（SAW-IDT），并進(jìn)行了頻率響應(yīng)測試。研究結(jié)果為聲表面波叉指換能器的制備、性能測試和應(yīng)用提供了指導(dǎo)。

    Abstract:

    In order to optimize the actuating performance of single layer surface acoustic wave interdigital transducer (SAW-IDT) and to improve the deficiencies of calculation process of the δ function analysis method, the static properties of the SAW-IDT were analyzed by the finite element simulation optimization method. The influence of the width of the branch electrodes (w), the electrodes interval (s), and the thickness of the substrate (t) on the actuating performance of SAW-IDT was investigated. The simulation results show that when w/t=0.7, the optimal strain response can be obtained; when s/t>3.2, the maximum strain can be obtained. Besides, it can also be concluded that the smaller the electrode interval, the lower the actuating voltage. According to the simulated optimization results, a SAW-IDT was prepared and the frequency response was tested by experiments. The results provide a guidance for the preparation, performance testing, and application of SAW-IDT.

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引用本文

王自平,費(fèi)躍,錢磊,薛顯,Karthik Reddy.單層聲表面波叉指換能器(SAW-IDT)結(jié)構(gòu)優(yōu)化設(shè)計[J].稀有金屬材料與工程,2021,50(11):3917~3923.[Wang Ziping, Fei Yue, Qian Lei, Xue Xian, Reddy Karthik. Structural Optimization Design for Single Layer Surface Acoustic Wave Interdigital Transducer (SAW-IDT)[J]. Rare Metal Materials and Engineering,2021,50(11):3917~3923.]
DOI：10.12442/j. issn.1002-185X.20200647

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  • 收稿日期:2020-08-29
  • 最后修改日期:2020-11-09
  • 錄用日期:2020-12-14
  • 在線發(fā)布日期: 2021-11-25
  • 出版日期: 2021-11-24