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深振蕩磁控濺射制備柔性硬質(zhì)納米涂層的研究進(jìn)展
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1.北京師范大學(xué)核科學(xué)與技術(shù)學(xué)院射線束技術(shù)教育部重點(diǎn)實(shí)驗(yàn)室;2.1;3.北京市輻射中心;4.西北核物理研究所;5.北京金輪坤天特種機(jī)械有限公司

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國(guó)家科技重大專項(xiàng)(2017-VII-0012-0107), 國(guó)家自然科學(xué)基金聯(lián)合基金重點(diǎn)項(xiàng)目(U1865206), 廣東省重點(diǎn)領(lǐng)域研發(fā)計(jì)劃 (2019B090909002),2020年北科萌芽計(jì)劃項(xiàng)目


Research progress of flexible hard coating deposited by deep oscillating magnetron sputtering
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    摘要:

    柔性硬質(zhì)納米涂層具有高致密性、高表面完整性、高硬度、高韌性和高裂紋抵抗力特性，是新一代高性能納米涂層的一個(gè)重要發(fā)展方向，但其制備難度高，難以利用傳統(tǒng)涂層制備技術(shù)實(shí)現(xiàn)。深振蕩磁控濺射（Deep Oscillation Magnetron Sputtering, DOMS）技術(shù)是一種新型的高功率脈沖磁控濺射技術(shù)，現(xiàn)已成為國(guó)際涂層研究領(lǐng)域的熱點(diǎn)。DOMS技術(shù)通過一系列調(diào)制的電壓微脈沖振蕩波形，能夠?qū)崿F(xiàn)完全消除電弧放電和靶材近全離化，獲得高密度、低離子能量和高束流密度的等離子體，能制備出具有低缺陷、高表面完整性、高致密性的高性能納米涂層，并且對(duì)納米涂層的成分、結(jié)構(gòu)和性能實(shí)現(xiàn)“剪裁化”的可控制備。本文綜述了柔性硬質(zhì)納米涂層的特征以及DOMS制備柔性硬質(zhì)納米涂層的最新進(jìn)展。

    Abstract:

    Flexible hard coatings with high density, high surface integrity and smooth surface morphology exhibit simultaneously high hardness, high toughness and high crack resistance which represent a new class of high-performance coatings. However, their depositions are a hard work. Deep oscillation magnetron sputtering (DOMS) is a novel high-power impulse magnetron sputtering, which become a hotspot in tribological hard coatings around world. Using a series of modulated micro-pulse of voltage oscillation, DOMS can achieve virtually arc-free high-power discharge to generate highly ionized target species to obtain high dense plasma with low ion energy and high ion flux. These features allow to prepare high-performance nanostructured coating, which can be modulated by composition, structure and properties using a series of micro-pulse under optimized deposition conditions. In this paper, we summarize characteristics of flexible hard nanostructured coatings and research progress in recent years of flexible hard nanostructured coatings deposited by DOMS technology.

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王浩琦,孫麗,歐伊翔,,金小越,張旭,華青松,龐盼,羅軍,陳琳,廖斌,歐陽曉平,鮑曼雨.深振蕩磁控濺射制備柔性硬質(zhì)納米涂層的研究進(jìn)展[J].稀有金屬材料與工程,2021,50(8):2993~3002.[Wang Haoqi, Sun Li, Ou Yixiang,,Jin Xiaoyue, Zhang Xu, Hua Qingsong, Pang Pan, Jun Luo, Chen Lin, Liao Bin, Ouyang Xiaoping, Bao Manyu. Research progress of flexible hard coating deposited by deep oscillating magnetron sputtering[J]. Rare Metal Materials and Engineering,2021,50(8):2993~3002.]
DOI：10.12442/j. issn.1002-185X.20200438

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  • 收稿日期:2020-06-23
  • 最后修改日期:2020-09-17
  • 錄用日期:2020-10-15
  • 在線發(fā)布日期: 2021-09-07
  • 出版日期: 2021-08-31