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鍍銅膜工藝在高功率輸入耦合器中的應(yīng)用
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中國科學(xué)院空天信息創(chuàng)新研究院

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國家自然科學(xué)基金資助(項目號:61771454)


Application of copper plating technology in the fundamental power input coupler
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Aerospace Information Research Institute Chinese Academy of Sciences

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    摘要:

    高功率輸入耦合器是為自由電子激光裝置的超導(dǎo)腔傳輸微波功率的部件。為了提高傳輸性能,需要在耦合器上鍍銅膜。本文基于兩種不同鍍銅膜工藝實驗,通過線性掃描、粗糙度、XRD和殘余電阻率(RRR)對比分析在常溫(25 ℃)以及200 ℃、400 ℃、600 ℃和910 ℃等四中不同溫度退火后鍍銅膜的性能變化,確定出適合特殊環(huán)境條件下高功率輸入耦合器波紋管內(nèi)壁鍍銅膜工藝。將這一工藝應(yīng)用于1.3 GHz高功率輸入耦合器鍍銅膜。結(jié)果表明,銅膜與耦合器內(nèi)表面的結(jié)合力、高低溫適應(yīng)性和微波能量傳輸效率都能很好地滿足實際應(yīng)用的要求。

    Abstract:

    An The fundamental power input coupler is a component of the free electron laser device, which transmits microwave power to the superconducting cavity. In order to improve the transmission performance, the coupler needs to be coated with copper film. In this paper, the coupler was plated with copper film by electroless plating and electroplating, respectively. Though the linear scanning, roughness, X-ray diffraction and residual resistivity ratio, the performance changes of the copper films prepared by these two copper plating methods at room temperature (25 ℃) and after vacuum annealing temperatures (200 ℃, 400 ℃, 600 ℃ and 910 ℃) were investigated. Furthermore, the copper plating technology for the inner surface of bellows of the coupler was determined, and this process was applied to the 1.3 GHz fundamental power input coupler. The results show that the bonding force between the copper film and the inner surface of the coupler and the efficiency of microwave energy transmission can meet the requirements of practical application.

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張帥,羅積潤,王小霞,張瑞,吳質(zhì)潔.鍍銅膜工藝在高功率輸入耦合器中的應(yīng)用[J].稀有金屬材料與工程,2021,50(4):1409~1416.[Zhang Shuai, Luo Jirun, Wang Xiaoxia, Zhang Rui, Wu Zhijie. Application of copper plating technology in the fundamental power input coupler[J]. Rare Metal Materials and Engineering,2021,50(4):1409~1416.]
DOI:10.12442/j. issn.1002-185X.20200384

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  • 收稿日期:2020-06-03
  • 最后修改日期:2020-07-11
  • 錄用日期:2020-07-21
  • 在線發(fā)布日期: 2021-05-08
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