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Co90Zr7Ta3三元合金微觀組織及磁性能的研究
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作者單位:

有研億金新材料有限公司

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通訊作者:

中圖分類號:

TG146；TG156.2

基金項目:

國家重點研發(fā)計劃項目支助項目(項目號2017YFB0305502)


Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy
Author:
Affiliation:

Grikin Advanced Materials Co.,Ltd.,Beijing Engineering Research Center of High Purity Metal Sputtering Targets

Fund Project:

National Key R&D Program of China

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    摘要:

    本文通過金相組織觀察、XRD分析和透磁率檢測，研究了Co90Zr7Ta3三元合金微觀組織，并通過分析材料組織與透磁率(PTF, pass through flux)變化，得到熱機械處理對透磁率的影響。實驗結(jié)果表明：真空熔煉制備的Co90Zr7Ta3三元合金有大量枝晶組織，主要包含Co基體和枝晶結(jié)構(gòu)的(Co,Ta)11Zr2。采用軋制及熱處理后，合金內(nèi)部枝晶結(jié)構(gòu)破碎，發(fā)生球化。合金中Co基體中的fcc相轉(zhuǎn)變?yōu)閔cp相，hcp相中(0001)含量的增加提高了靶材透磁率。

    Abstract:

    In this paper, the microstructure of Co90Zr7Ta3 ternary alloy and the effect of microstructure on the PTF (pass through flux) were studied by means of metallographic observation, XRD analysis and PTF measurement. The influence of thermo mechanical treatment on the permeability was obtained by analyzing the structure and PTF of the material. The results show that the ternary alloy of Co90Zr7Ta3 prepared by vacuum melting mainly contains the precipitates of Co matrix and dendrite structure of (Co,Ta)11Zr2. After rolling and heat treatment, the dendrite structure in the alloy was broken to form dispersed precipitates. At the same time, the fcc phase in Co matrix is transformed into hcp phase, and the permeability of the target is improved by increasing the orientation of (0001) in hcp phase.

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引用本文

羅俊鋒,顧曉倩,徐國進,李勇軍,賀昕,熊曉東. Co90Zr7Ta3三元合金微觀組織及磁性能的研究[J].稀有金屬材料與工程,2021,50(3):1016~1019.[Luo Junfeng, Gu Xiaoqian, Xu Guojin, Li Yongjun, He Xin, Xiong Xiaodong. Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy[J]. Rare Metal Materials and Engineering,2021,50(3):1016~1019.]
DOI：10.12442/j. issn.1002-185X.20200308

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歷史
  • 收稿日期:2020-05-11
  • 最后修改日期:2020-06-12
  • 錄用日期:2020-06-30
  • 在線發(fā)布日期: 2021-04-02
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