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晶界幾何結(jié)構(gòu)對納晶ZnO材料導熱過程的影響
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華北電力大學

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31.15.xv, 44.10.+i

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中央高?;究蒲芯繕I(yè)務(wù)費(批準號:2020MS105)


Liu Yingguang, Han Xiao, Hao Jiangshuai
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North China Electric Power University

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    摘要:

    納晶ZnO材料在微電子領(lǐng)域有著廣泛應(yīng)用,其導熱特性對電子器件性能有著重要的影響。為了探究晶界幾何結(jié)構(gòu)對納晶ZnO材料導熱性能的影響,論文將晶界表面抽象出幾種典型幾何形狀,深入討論了晶界表面粗糙度的計算以及聲子入射角對鏡面反射率的影響,改進了晶界鏡面反射率的計算模型。采用PhonTS軟件,用迭代法求解玻爾茲曼輸運方程模擬計算得到了納晶ZnO晶格熱導率?;诜肿觿恿W理論計算了ZnO完美材料的熱導率,分析了鏡面反射率、聲子入射角、晶粒尺寸等因素對熱導率的影響。結(jié)果表明:(1)晶界表面粗糙度的減小或聲子入射角的增大會使晶界鏡面反射率增大;(2)聲子在晶界發(fā)生鏡面反射不會產(chǎn)生熱阻,納晶材料的熱導率會隨著鏡面反射率的增大而增大;(3)納晶ZnO材料的熱導率表現(xiàn)出強烈的尺寸效應(yīng),尺寸效應(yīng)隨著晶粒尺寸的增大而減小。

    Abstract:

    Nanocrystalline ZnO is widely used in the field of microelectronics, and its thermal conductivity has an important effect on the performance of electronic devices. In order to explore the effect of grain boundary geometry on the thermal conduction of nanocrystalline ZnO,,the grain boundary geometries were abstracted into several typical structures. On this basis, the calculation of grain boundary surface roughness and the effect of phonons incident angle on specular reflectance were discussed, and the calculation model of grain boundary specular reflectance was improved. PhonTS software was used to solve the boltzmann transport equation iteratively to obtain the perfect lattice thermal conductivity of nanocrystalline ZnO. The thermal conductivity of nanocrystal ZnO was calculated based on the molecular dynamics theory, and effects of specular reflectance, phonon incidence angle and grain size on the thermal conductivity were analyzed. The results showed that: (1) the decreases of grain boundary surface roughness or the increases of phonon incidence angle will increase the specular reflectance of grain boundary; (2) phonons specular reflectance at grain boundary will not generate thermal resistance, and the thermal conductivity of nanocrystalline materials increases with the increase of specular reflectance; (3) the thermal conductivity of nanocrystalline ZnO shows a strong size effect, which decreases with the increasing of grain size.

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劉英光,韓笑,郝將帥.晶界幾何結(jié)構(gòu)對納晶ZnO材料導熱過程的影響[J].稀有金屬材料與工程,2021,50(3):924~931.[liuyingguang, Han Xiao, Hao Jiangshuai. Liu Yingguang, Han Xiao, Hao Jiangshuai[J]. Rare Metal Materials and Engineering,2021,50(3):924~931.]
DOI:10.12442/j. issn.1002-185X.20200272

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  • 收稿日期:2020-04-24
  • 最后修改日期:2020-06-14
  • 錄用日期:2020-06-30
  • 在線發(fā)布日期: 2021-04-02
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