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CVD在介電材料表面直接制備石墨烯進展
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1.西安建筑科技大學(xué);2.西北有色金屬研究院;3.東北大學(xué)

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TB321;O84

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陜西省創(chuàng)新人才計劃項目(2017CKT-06);科技部國際合作項目(2014DFR50450);陜西省自然科學(xué)基礎(chǔ)研究計劃(2019JQ-940);面向苛刻環(huán)境的材料制備與防護技術(shù)工業(yè)和信息化部重點實驗室


Progress in direct preparation of graphene on the surface of dielectric substrate by CVD
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    摘要:

    石墨烯一種SP2碳雜化的二維平面材料,因其卓越的電學(xué)、機械、光學(xué)性能,在半導(dǎo)體、電子、光學(xué)、傳感器等多領(lǐng)域具有巨大的應(yīng)用潛力。雖然石墨烯可以通過直接從母材剝離或過渡金屬上生長來制備,但不受控制的生產(chǎn)或額外的復(fù)雜轉(zhuǎn)移過程對石墨烯膜層造成一定損傷,而在介電襯底上通過CVD法直接制備石墨烯成為一個有意義的研究方向。文章綜述國內(nèi)外介電材料表面CVD法直接制備石墨烯研究進展,系統(tǒng)的介紹了介電材料表面直接制備石墨烯的主要方法,闡明生長過程中催化條件、生長參數(shù)是介電材料表面制備石墨烯的關(guān)鍵。此外,由于介電材料表面的弱催化作用,其表面直接制備石墨烯晶疇尺寸小,電性能較差,因此實現(xiàn)介電材料表面石墨烯高質(zhì)量、可控制備是今后研究的方向。

    Abstract:

    Graphene, a one-atom-thick layer of carbon with sp2 hybrid orbital bonding and two-dimensional structure material ,has excellent electrical, mechanical, and optical properties. With its extraordinary structure and excellent properties,graphene has great application potential in many fields such as semiconductors, electronics, optics, and sensors. While graphene can be prepared by direct exfoliation from mother materials or growth on transition metals, the uncontrolled production or the additional complex transfer process has been challenging for graphene applications, therefore the direct preparation of graphene on the dielectric substrate by CVD has become an interesting research direction. This paper reviews the research progress of direct preparation of graphene by CVD on dielectric substrates surface at home and abroad, systematically introduces the main methods of direct preparation of graphene on dielectric material surface, and expounds that the catalytic conditions and growth parameters during the growth process are the key to the preparation of graphene on dielectric substrates. In addition, due to the weak catalysis on the surface of dielectric materials, the direct preparation of graphene on the surface has small domain size and poor electrical properties. Therefore, the realization of high quality and controllable preparation of graphene on the surface of dielectric materials is the future research direction.

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李偉,劉林濤,李爭顯,王彥峰,劉家歡,李龍博. CVD在介電材料表面直接制備石墨烯進展[J].稀有金屬材料與工程,2020,49(11):3987~3997.[Li Wei, Liu Lintao, Li zhengxian, Wang Yanfeng, Liu Jiahaun, Li Longbo. Progress in direct preparation of graphene on the surface of dielectric substrate by CVD[J]. Rare Metal Materials and Engineering,2020,49(11):3987~3997.]
DOI:10.12442/j. issn.1002-185X.20200241

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  • 收稿日期:2020-04-12
  • 最后修改日期:2020-06-22
  • 錄用日期:2020-06-30
  • 在線發(fā)布日期: 2020-12-09
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