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The cold deformation and recrystallization behavior of Inconel 625 superalloy were studied by using compression deformation at room temperature and recrystallization annealing. The strain distribution, grain size change, microstructure and texture evolution during cold deformation, as well as recrystallization fraction, grain sizes, microstructure and texture evolution of cold deformed Inconel 625 superalloy during recrystallization annealing were analyzed by EBSD technique. Studies have shown that Inconel 625 superalloy has good plasticity when the deformation is 35%~65%. With the increase of deformation, the grain size decreases and the strain distribution is more uniform, {111}<112> texture and {110} <001> texture is gradually weakened, while the {001}<110> texture and the {112}<111> texture are slightly enhanced. After recrystallization annealing treatment of cold deformed Inconel 625 superalloy, the recrystallization fraction increases with the increase of annealing temperature and holding time. With the increase of deformation, the annealing temperature decreases when complete recrystallization with finer grains occurs. When the deformation is 35%, the recrystallization process is mainly {112}<111> texture and {123 <634> texture transformed into {110}<112> texture, {001}<100> texture and {124}<211> texture. With the increase of deformation amount to 50% and 65%, the {123}<634> texture produced by cold deformation transforms into {124}<211> texture during recrystallization.