Abstract:In this study, the ITO coatings were deposited on PMMA by high-power?pulse?magnetron?sputtering (HPPMS). The effects of HPPMS on the coatings by different parameters were investigated, and the phase, bonding strength,transmittance and resistivity were characterized by XRD, scratch tester, spectrophotometer and holzer test platform respectively. The results show that phase, bonding?strength, transmittance and resistivity are affected by pulsed bias and flowrate ratio of hydrogen and argon. With increasing the pulsed bias, the bonding?strength becomes better, the best bonding?strength is 56.5N when pulsed bias is 240 V. with the pulsed bias increasing from 0 V to 160 V, the grain size gets bigger, the transmittance becomes better( increasing from 82.24% to 89.82% ) and the resistivity also becomes better (decreases from 0.006571 to 0.000543 Ω.cm). With the flowrate ratio of hydrogen and argon increasing from 0 to 0.05,the transmittance becomes worse (decreasing from 89.82% to 56.12% ).With the flowrate ratio of hydrogen and argon increasing from 0 to 0.03 ,the resistivity becomes better( decreasing from 0.000543 to 0.000212 Ω.cm ) .With the flowrate ratio of hydrogen and argon increasing from 0.03 to 0.05,the resistivity becomes worse(increasing from 0.000212 to 0.000373 Ω.cm) .