73.5Cu1Nb3Si13.5B9非晶合金薄膜作為研究對(duì)象,研究了其壓磁效應(yīng)的特征及其負(fù)壓磁效應(yīng)現(xiàn)象。研究結(jié)果表明,淬態(tài)下的Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜在0-0.6KPa壓力帶具有顯著的正壓磁效應(yīng),隨著壓應(yīng)力增大,薄膜電感值下降。當(dāng)壓應(yīng)力σ=0.6kPa時(shí),壓磁效應(yīng)值Si%達(dá)到5.5%;環(huán)境溫度對(duì)壓磁效應(yīng)靈敏度有影響,在20~30 ℃范圍內(nèi),壓磁效應(yīng)和靈敏度穩(wěn)定性最好,隨著環(huán)境溫度升高,薄膜靈敏度和壓磁效應(yīng)值均降低;薄膜經(jīng)過(guò)退火處理后,薄膜內(nèi)應(yīng)力狀態(tài)會(huì)發(fā)生變化,當(dāng)退火溫度≧350℃時(shí),薄膜的壓磁效應(yīng)類型由“正壓磁效應(yīng)”轉(zhuǎn)變?yōu)椤柏?fù)壓磁效應(yīng)”,且隨著薄膜中內(nèi)應(yīng)力降低,|Si%|值下降,且薄膜的壓磁效應(yīng)受環(huán)境溫度影響減小。當(dāng)退火溫度為555℃時(shí),|Si%|值最小,σ=0.66kPa時(shí),|Si%|值0.5%;當(dāng)退火溫度達(dá)到薄膜的晶化溫度時(shí),薄膜的壓磁效應(yīng)受環(huán)境溫度影響最小。"/>

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Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜壓磁效應(yīng)的特征及負(fù)壓磁效應(yīng)現(xiàn)象研究
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1.南昌大學(xué) 材料科學(xué)與工程學(xué)院;2.南昌大學(xué) 空間與技術(shù)研究院

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The Study on the Characteristics of Piezomagnetic Properties and the Phenomenon of Negative PiezomagneticEffect of Fe73.5Cu1Nb3Si13.5B9 Amorphous Alloy Films
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    摘要:

    本文以Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜作為研究對(duì)象,研究了其壓磁效應(yīng)的特征及其負(fù)壓磁效應(yīng)現(xiàn)象。研究結(jié)果表明,淬態(tài)下的Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜在0-0.6KPa壓力帶具有顯著的正壓磁效應(yīng),隨著壓應(yīng)力增大,薄膜電感值下降。當(dāng)壓應(yīng)力σ=0.6kPa時(shí),壓磁效應(yīng)值Si%達(dá)到5.5%;環(huán)境溫度對(duì)壓磁效應(yīng)靈敏度有影響,在20~30 ℃范圍內(nèi),壓磁效應(yīng)和靈敏度穩(wěn)定性最好,隨著環(huán)境溫度升高,薄膜靈敏度和壓磁效應(yīng)值均降低;薄膜經(jīng)過(guò)退火處理后,薄膜內(nèi)應(yīng)力狀態(tài)會(huì)發(fā)生變化,當(dāng)退火溫度≧350℃時(shí),薄膜的壓磁效應(yīng)類型由“正壓磁效應(yīng)”轉(zhuǎn)變?yōu)椤柏?fù)壓磁效應(yīng)”,且隨著薄膜中內(nèi)應(yīng)力降低,|Si%|值下降,且薄膜的壓磁效應(yīng)受環(huán)境溫度影響減小。當(dāng)退火溫度為555℃時(shí),|Si%|值最小,σ=0.66kPa時(shí),|Si%|值0.5%;當(dāng)退火溫度達(dá)到薄膜的晶化溫度時(shí),薄膜的壓磁效應(yīng)受環(huán)境溫度影響最小。

    Abstract:

    Herein we report an investigation of the piezomagnetic properties and the negative piezomagnetic effect in a Fe73.5Cu1Nb3Si13.5B9 amorphous alloy film. The results show that in its quenched state, the Fe73.5Cu1Nb3Si13.5B9 amorphous alloy film has a significant positive piezomagnetic property. Furthermore, the inductance of the alloy film decreases substantially in the 0–0.66 kPa pressure zone, whereas the compressive stress, σ, increases. At a σ value of 0.66 kPa, the piezomagnetic effect value, SI, reaches 5.5%; The ambient temperature has significant influence on the sensitivity of the piezomagnetic property. The films show optimal piezomagnetic properties and sensitivity stability in the temperature range of 20–30 °C. Increases in ambient temperature lead to increases in the piezomagnetic property and sensitivity values, and the inner stress state of the film changed after annealing treatment. At an annealing temperature of 350 °C, the piezomagnetic effect of the film changes from being "positive " to "negative." Furthermore, as the internal stress decreases, the value of |SI| decreases, and the piezomagnetic property of the film becomes less sensitive to changes in the ambient temperature. For an annealing temperature of 555 °C, the value of |SI| is minimum (0.59%), at a σ value of 0.44 kPa. When the annealing temperature reaches the crystallization temperature, the piezomagnetic property of the film becomes less sensitive to changes in the ambient temperature.

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陳杰,朱正吼,林前英,白茹茹,趙輝. Fe73.5Cu1Nb3Si13.5B9非晶合金薄膜壓磁效應(yīng)的特征及負(fù)壓磁效應(yīng)現(xiàn)象研究[J].稀有金屬材料與工程,2020,49(4):1204~1210.[CHEN Jie, ZHU Zhenghou, LIN Qianying, BAI Ruru, ZHAO Hui. The Study on the Characteristics of Piezomagnetic Properties and the Phenomenon of Negative PiezomagneticEffect of Fe73.5Cu1Nb3Si13.5B9 Amorphous Alloy Films[J]. Rare Metal Materials and Engineering,2020,49(4):1204~1210.]
DOI:10.12442/j. issn.1002-185X.20181178

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  • 收稿日期:2018-11-23
  • 最后修改日期:2020-03-29
  • 錄用日期:2019-02-21
  • 在線發(fā)布日期: 2020-05-07
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