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沉積溫度對高功率脈沖磁控濺射AlCrSiN涂層結(jié)構(gòu)和性能的影響*
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天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,中國科學(xué)院金屬研究所 材料表面工程研究部 沈陽

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國家自然科學(xué)(51301181)；天津市應(yīng)用基礎(chǔ)與前沿技術(shù)研究計劃重點項目(15JCZDJC39700)；天津市高等學(xué)校創(chuàng)新團隊培養(yǎng)計劃項目(TD12-5043)


Influence of Deposition Temperature on Microstructures and Mechanical Properties of Al-Cr-Si-N Coatings Deposited by HiPIMS Technology
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Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Institute of Metal Research,Chinese Academy of Sciences,Shenyang

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    摘要:

    高功率脈沖磁控濺射(HiPIMS)技術(shù)由于高離化率、高離子能量,可制備表面光滑、結(jié)構(gòu)致密的高質(zhì)量涂層。而沉積溫度能夠決定沉積粒子的動能和擴散能力,將對涂層生長過程和性能有著顯著影響,本文采用HIPIMS技術(shù)在不同沉積溫度下制備了Al-Cr-Si-N涂層。系統(tǒng)研究了沉積溫度對涂層結(jié)構(gòu)、成分、顯微形貌、力學(xué)和摩擦學(xué)性能的影響。結(jié)果表明：隨著沉積溫度由100°C升至350°C,涂層內(nèi)部開始由非晶向納米晶轉(zhuǎn)化,300°C時出現(xiàn)FCC-AlN相；涂層平整性和致密性逐步改善,膜/基結(jié)合強度逐漸提高,在300°C達(dá)到最大值82 N,但溫度繼續(xù)升高至350°C 時,嚴(yán)重的轟擊刻蝕作用使臨界載荷驟降至18 N；涂層硬度逐漸增加,在350°C達(dá)到最大值19 Gpa；涂層內(nèi)應(yīng)力整體呈下降趨勢,由-0.8 GPa逐漸降低至-0.4 GPa左右。

    Abstract:

    High power pulsed magnetron sputtering (HiPIMS) technology can be used to prepare high quality coatings with smooth surface and dense structure due to its high ionization rate and high ion energy. And the deposition temperature will determine the kinetic energy and diffusion ability of the deposited particles, which has a significant impact on the growth process and performance. In this paper, Al-Cr-Si-N coating is prepared by HiPIMS technology at different deposition temperatures. The effects of deposition temperature on the structure, composition, microstructure, mechanical properties and tribological properties of the coatings were systematically studied. The results show that as the deposition temperature rises from 100°C to 350°C, the interior of the coating begins to convert from amorphous to nanocrystals, and the FCC-AlN phase appears at 300°C. The smoothness and compactness of the coatings are progressively improved. The adhesion strength increase gradually, reached the maximum value of 83N at 300 °C and decreases to 18N at 350 °C due to the serious glow etching effect .The hardness of the coating increases gradually and reaches a maximum of 19 GPa at 350°C. No columnar crystals are found and the residual stress is low, and the inverse Hallpez effect occurs, due to the increase in kinetic energy of the deposited particles and the densification of the structure.

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王鐵鋼,李柏松,張姣姣,唐寬瑜,劉艷梅,姜素猛.沉積溫度對高功率脈沖磁控濺射AlCrSiN涂層結(jié)構(gòu)和性能的影響*[J].稀有金屬材料與工程,2018,47(8):2578~2584.[WANG Tiegang, LI Baisong, ZHANG Jiaojiao, TANG Kuanyu, LIU Yanmei, JIANG Sumeng. Influence of Deposition Temperature on Microstructures and Mechanical Properties of Al-Cr-Si-N Coatings Deposited by HiPIMS Technology[J]. Rare Metal Materials and Engineering,2018,47(8):2578~2584.]
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  • 收稿日期:2017-12-18
  • 最后修改日期:2018-01-12
  • 錄用日期:2018-02-09
  • 在線發(fā)布日期: 2018-10-17
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