3/E*2均達最大值,分別為0.1475和0.3681GPa,此時涂層具有最佳的耐磨性能,摩擦系數(shù)亦最低。"/>

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直流基體偏壓對Al-Cr-Si-N涂層結(jié)構(gòu)和力學(xué)性能的影響
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天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津,中國科學(xué)院金屬研究所 材料表面工程研究部 沈陽,天津職業(yè)技術(shù)師范大學(xué) 天津市高速切削與精密加工重點實驗室 天津

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國家自然科學(xué)No. 51301181；天津市應(yīng)用基礎(chǔ)與前沿技術(shù)研究計劃重點項目No. 15JCZDJC39700；天津市科技特派員項目No. 16JCTPJC49500；天津市高等學(xué)校創(chuàng)新團隊培養(yǎng)計劃項目No. TD12-5043


Influence of DC bias voltage on Structure and Performance of theAl-Cr-Si-N Coatings Prepared by Arc Ion Plating Techniques
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Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Surface Engineering of Materials Division,Institute of Metal Research,Chinese Academy of Sciences,Shenyang,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin

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    摘要:

    采用電弧離子鍍技術(shù)在不同直流偏壓下沉積Al-Cr-Si-N涂層,研究基體偏壓對涂層成分、微觀結(jié)構(gòu)和性能的影響。結(jié)果表明：Al-Cr-Si-N涂層以密排六方結(jié)構(gòu)和面心立方結(jié)構(gòu)的AlN相為主,隨著基體負偏壓增加,涂層的衍射峰整體向小角度方向偏移；涂層內(nèi)殘余壓應(yīng)力逐漸增加,最大值為-0.77GPa；涂層硬度和摩擦系數(shù)變化不明顯。當(dāng)基體負偏壓為-40V時,Al-Cr-Si-N涂層的特征參數(shù)H/E和H3/E*2均達最大值,分別為0.1475和0.3681GPa,此時涂層具有最佳的耐磨性能,摩擦系數(shù)亦最低。

    Abstract:

    Al-Cr-Si-N coatings were deposited by arc ion plating (AIP) technique at various DC bias voltages. The effects of bias voltage on the microstructure, mechanical and wear properties of the Al-Cr-Si-N coatings were investigated. The results show that the Al-Cr-Si-N coatings is mainly composed of the hexagonal structure and the face-centered cubic structure of AlN phase. with the increase of substrate bias, the diffraction peak of the coating is shifted to the small angle. Compressive stress gradually increased, the maximum value of -0.77GPa; coating hardness and friction coefficient change is not obvious. When the negative bias of the substrate is -40V, the characteristic parameters H/E and H3/E* 2 of Al-Cr-Si-N coating are the maximum, which are 0.1475 and 0.3681GPa, respectively. At the same time, the coating had the best wear resistance and the friction coefficient was the lowest.

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張姣姣,王鐵鋼,閻兵,劉源,姜素猛,董玉.直流基體偏壓對Al-Cr-Si-N涂層結(jié)構(gòu)和力學(xué)性能的影響[J].稀有金屬材料與工程,2018,47(7):2232~2239.[ZHANG Jiaojiao, WANG Tiegang, YAN Bing, LIU Yuan, JIANG Sumeng, DONG Yu. Influence of DC bias voltage on Structure and Performance of theAl-Cr-Si-N Coatings Prepared by Arc Ion Plating Techniques[J]. Rare Metal Materials and Engineering,2018,47(7):2232~2239.]
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  • 收稿日期:2017-10-10
  • 最后修改日期:2017-11-18
  • 錄用日期:2017-12-13
  • 在線發(fā)布日期: 2018-10-10
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