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基于脈寬參量的TiN納米晶薄膜制備及性能研究
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西安理工大學材料科學與工程學院

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國家自然科學基金資助(項目號52171144)


Study on preparation and properties of TiN nanocrystalline films based on pulse width parameter
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xi''an university of technology

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    摘要:

    采用大功率脈沖濺射離子鍍技術在不同脈寬條件下制備了一組TiN離子鍍層,并通過XRD、SEM、AFM等手段對膜層的微觀形貌、生長模式及相關力學性能進行了分析研究。研究結(jié)果表明:隨著脈寬的增大,TiN膜層的瞬時沉積速率提高,膜層內(nèi)部的晶化程度逐漸增強,薄膜晶粒尺寸有所增大,微觀形貌顯示為較典型的TiN(111)三角錐形以及柱狀生長,顆粒尺寸及表面粗糙度均隨脈寬的延長而增大,膜層整體無明顯孔隙等缺陷存在。力學性能方面,通過對H/E值的分析可以看出,較小脈寬條件下制備的膜層綜合性能較好、可以獲得較高的膜層硬度以及較大的硬度-模量比。

    Abstract:

    A series of TiN films were prepared by high power pulse sputtering with different pulse width parameter, and the morphology, growth pattern and mechanical properties were studied by XRD, SEM, AFM and other means of the films. The result shows that the instantaneous deposition rate of TiN films increase, the crystalline degree increases gradually, and the grain size of the films increases with the increasing of pulse width. The micro morphology shows typical triangular cone and columnar growth of TiN(111) crystal orientation. Both particle size and surface roughness increase during the increasing of pulse width. No obvious pores and significant defects exist in the films. In mechanical properties, the analysis of H\E value shows that the films have better comprehensive properties, higher coating hardness and larger Hardness modulus ratio under the condition of small pulse width.

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喬泳彭,蔣百靈,丁郁航,張靜.基于脈寬參量的TiN納米晶薄膜制備及性能研究[J].稀有金屬材料與工程,2019,47(3):916~922.[Qiao Yongpeng, Jiang Bailing, Ding Yuhang, Zhang Jing. Study on preparation and properties of TiN nanocrystalline films based on pulse width parameter[J]. Rare Metal Materials and Engineering,2019,47(3):916~922.]
DOI:10.12442/j. issn.1002-185X.20170635

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  • 收稿日期:2017-07-18
  • 最后修改日期:2017-09-18
  • 錄用日期:2017-09-29
  • 在線發(fā)布日期: 2019-04-10
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