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脈沖偏壓占空比對電弧離子鍍TiAlN涂層的影響
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中國地質(zhì)大學北京工程技術(shù)學院

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國家自然科學基金資助(項目號51275494)；中央高?；究蒲袠I(yè)務(wù)費專項資金資助(項目號2652015084)


Influence of Duty Ratio of Pulsed Bias on TiAlN Coatings Deposited by Arc Ion Plating
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School of Engineering and Technology,China University of Geosciences

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National Natural Science Foundation of China (51275494) and the Fundamental Research Funds for the Central Universities (2652015084)

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    摘要:

    通過優(yōu)化電弧離子鍍工藝參數(shù)改善TiAlN涂層結(jié)構(gòu)及性能對TiAlN涂層應(yīng)用具有重要的實用價值。本文利用脈沖偏壓電弧離子鍍制備了TiAlN涂層，研究了偏壓占空比對TiAlN涂層結(jié)構(gòu)及性能的影響，結(jié)果發(fā)現(xiàn)：隨著占空比增加，涂層表面缺陷密度和表面粗糙度先降低后增大，占空比為70%時，制備的涂層表面缺陷密度和表面粗糙度最低。隨著占空比增加，涂層的硬度和耐磨性得到明顯改善，但占空比超過50%后繼續(xù)增加占空比反而降低了涂層的硬度和耐磨性。TiAlN涂層與Si3N4球?qū)δr的主要磨損機制為黏著磨損和氧化磨損。

    Abstract:

    Optimization of the process parameters of arc ion plating so as to improve the structure and properties of TiAlN coatings has important practical value in the application of TiAlN coatings. In the work, TiAlN coatings were deposited by pulsed bias arc ion plating, and the influence of duty ratio of pulsed bias on the structure and properites of TiAlN coatings was studied. It was found that the density of surface defects and surface roughness of TiAlN coatings are first decreased and then increased with the increase of the duty ratio; and the density of surface defects and surface roughness is the lowest when the duty ratio is 70%. The micro-hardness and wear resistance of TiAlN coated samples is first improved with the increase of the duty ratio, while the further increase of the duty ratio above 50% has an adverse effect on the micro-hardness and wear resistance. The key wear mechanism of TiAlN coatings includes adhesive wear and oxidation wear when Si3N4 ball is used as the friction pair.

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付志強,苗志玲,岳文,王成彪,康嘉杰,朱麗娜,彭志堅.脈沖偏壓占空比對電弧離子鍍TiAlN涂層的影響[J].稀有金屬材料與工程,2018,47(11):3482~3486.[Fu Zhiqiang, Miao Zhiling, Yue Wen, Wang Chengbiao, Kang Jiajie, Zhu Lina, Peng Zhijian. Influence of Duty Ratio of Pulsed Bias on TiAlN Coatings Deposited by Arc Ion Plating[J]. Rare Metal Materials and Engineering,2018,47(11):3482~3486.]
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  • 收稿日期:2017-03-02
  • 最后修改日期:2017-05-03
  • 錄用日期:2017-05-16
  • 在線發(fā)布日期: 2018-12-19
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