2。通過對薄膜的結(jié)構(gòu)表征知,場發(fā)射性能的增強(qiáng)主要與界面處電子運(yùn)輸勢壘的降低及薄膜中sp2 C含量的增加有關(guān),在界面處及金剛石膜內(nèi)形成良好的導(dǎo)電通道,使電子更容易運(yùn)輸至薄膜表面,從而表現(xiàn)出優(yōu)異的場發(fā)射性能。"/>

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金屬過渡層增強(qiáng)金剛石薄膜場發(fā)射性能的機(jī)理研究
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湖南大學(xué)材料科學(xué)與工程學(xué)院

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TB43

基金項(xiàng)目:

國家自然科學(xué)基金項(xiàng)目(51675169)


Study on the Mechanism of Improving Field Emission Properties of Diamond Films by Metal Transition Layers
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College of Materials Science and Engineering,Hunan University

Fund Project:

The National Natural Science Foundation of China (51675169)

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    摘要:

    以金屬鈦和鎢為過渡層,采用PE-HFCVD法在硅基上制備金剛石薄膜,并對薄膜的場發(fā)射特性分析研究。結(jié)果表明,金屬過渡層對金剛石薄膜場發(fā)射性能有顯著的增強(qiáng)作用。以金屬鎢為過渡層時(shí),金剛石薄膜的場發(fā)射開啟場強(qiáng)為5.4 V/μm,比無過渡層降低了44%;場發(fā)射電流密度在電場強(qiáng)度為8.9 V/μm時(shí)達(dá)到1.48 mA/cm2。通過對薄膜的結(jié)構(gòu)表征知,場發(fā)射性能的增強(qiáng)主要與界面處電子運(yùn)輸勢壘的降低及薄膜中sp2 C含量的增加有關(guān),在界面處及金剛石膜內(nèi)形成良好的導(dǎo)電通道,使電子更容易運(yùn)輸至薄膜表面,從而表現(xiàn)出優(yōu)異的場發(fā)射性能。

    Abstract:

    The titanium and tungsten were used as the transition layer respectively, the mirco-crystalline diamond films on a silicon substrate were prepared by PE-HFCVD method. The field emission characteristics of the films were studied in this paper. The results show that, the metal transition layers can significantly enhance the field emission properties of the diamond films. When the transition layer is tungsten, the opening field intensity of the diamond film is 5.4 V/μm, which reduces by 44% compared with non-transition layer ; while the field emission current density can reach 1.48 mA/cm2 when the electric field intensity is 8.9 V/μm. The structure characterization of the films show that, The enhancement of the field emission properties is mainly attributed to the decrease of the electron transport barrier at the interface and the increase of the sp2 C content in the film. The formation of good conductive channels at the interface and the diamond film make the electron more easy to transport to the film surface. Hence, the diamond films which use metal transition layers show excellent field emission properties.

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張宇,楊武霖,符立才,朱家俊,李德意,周靈平.金屬過渡層增強(qiáng)金剛石薄膜場發(fā)射性能的機(jī)理研究[J].稀有金屬材料與工程,2018,47(11):3433~3438.[Zhang Yu, Yang Wulin, Fu Licai, Zhu Jiajun, Li Deyi, Zhou Lingping. Study on the Mechanism of Improving Field Emission Properties of Diamond Films by Metal Transition Layers[J]. Rare Metal Materials and Engineering,2018,47(11):3433~3438.]
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  • 收稿日期:2017-02-21
  • 最后修改日期:2017-05-19
  • 錄用日期:2017-05-24
  • 在線發(fā)布日期: 2018-12-19
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