Ti/TiN:RZr/ZrN調(diào)制比和不同厚度的Ti-TiN-Zr-ZrN多層膜。用掃描電鏡、X射線衍射儀、劃痕儀、顯微硬度計和應(yīng)力測試儀分析測試了多層膜的截面形貌、厚度、結(jié)合力、硬度和殘余應(yīng)力；重點研究了調(diào)制周期、調(diào)制比和膜層厚度等調(diào)制結(jié)構(gòu)的改變對多層膜殘余應(yīng)力和相關(guān)性能的影響。結(jié)果表明：增加調(diào)制周期,則殘余應(yīng)力降低,結(jié)合力和硬度均增大；降低RTi/TiN:RZr/ZrN調(diào)制比，則殘余應(yīng)力增大，結(jié)合力下降，硬度增加；增大多層膜厚度，則殘余應(yīng)力略有上升，結(jié)合力和硬度都提高，當(dāng)膜層厚度達到7.54μm后，硬度穩(wěn)定在30Gpa左右。"/>

最新色国产精品精品视频,中文字幕日韩一区二区不卡,亚洲有码转帖,夜夜躁日日躁狠狠久久av,中国凸偷窥xxxx自由视频

+高級檢索
調(diào)質(zhì)結(jié)構(gòu)對Ti-TiN-Zr-ZrN多層膜力學(xué)性能影響
DOI:
作者:
作者單位:

1.廣東省新材料研究所;2.深圳職業(yè)技術(shù)學(xué)院

作者簡介:

通訊作者:

中圖分類號:

基金項目:

廣東省省級科技計劃項目(2014B050503005,2016GDASPT-0206,2014B070706026)


Effect of modulation structure on mechanical properties of Ti-TiN-Zr-ZrN multilayer films
Author:
Affiliation:

1.Guangdong Institute of New Materials,National Engineering Laboratory for Surface Engineering Technology,The Key Lab of Guangdong for Modern Surface Engineering Technology;2.Shenzhen Polytechnic College

Fund Project:

  • 摘要
    • |
  • 圖/表
    • |
  • 訪問統(tǒng)計
    • |
  • 參考文獻
    • |
  • 相似文獻
    • |
  • 引證文獻
    • |
  • 資源附件
    • |
  • 文章評論
    摘要:

    采用真空陰極電弧離子鍍技術(shù),在TC11鈦合金和單晶Si片表面分別沉積不同調(diào)制周期、不同RTi/TiN:RZr/ZrN調(diào)制比和不同厚度的Ti-TiN-Zr-ZrN多層膜。用掃描電鏡、X射線衍射儀、劃痕儀、顯微硬度計和應(yīng)力測試儀分析測試了多層膜的截面形貌、厚度、結(jié)合力、硬度和殘余應(yīng)力；重點研究了調(diào)制周期、調(diào)制比和膜層厚度等調(diào)制結(jié)構(gòu)的改變對多層膜殘余應(yīng)力和相關(guān)性能的影響。結(jié)果表明：增加調(diào)制周期,則殘余應(yīng)力降低,結(jié)合力和硬度均增大；降低RTi/TiN:RZr/ZrN調(diào)制比，則殘余應(yīng)力增大，結(jié)合力下降，硬度增加；增大多層膜厚度，則殘余應(yīng)力略有上升，結(jié)合力和硬度都提高，當(dāng)膜層厚度達到7.54μm后，硬度穩(wěn)定在30Gpa左右。

    Abstract:

    Ti-TiN-Zr-ZrN multilayer films were deposited on TC11 titanium alloy and Si wafer by vacuum cathodic arc ion plating technology. The Ti-TiN-Zr-ZrN multilayer films with different modulation periods, different RTi/TiN:RZr/ZrNmodulation ratio and different thickness. The structure and performance of the multilayer films, especially residual stress were investigated by various analytical methods including scanning electron microscopy (SEM), X-ray diffraction(XRD), micro-hardness tester, scratch adhesion tester and stress gauge. The results show that increasing the modulation period, residual stress decreased, adhesive strength and hardness were increased. Reduce the modulation of RTi/TiN:RZr/ZrN modulation ratio, is residual stress and hardness increases, the adhesive strength decreased. Increasing the thickness of multilayer films, residual stress increased slightly, adhesion and hardness are improved. the film’s hardness around at 30Gpa when it’s thickness up to 7.54μm.

    參考文獻
    相似文獻
    引證文獻
引用本文

林松盛,周克崧,馮誠誠,代明江,石倩,趙升升.調(diào)質(zhì)結(jié)構(gòu)對Ti-TiN-Zr-ZrN多層膜力學(xué)性能影響[J].稀有金屬材料與工程,2018,47(11):3468~3472.[Lin Songsheng, Zhou Kesong, Feng Chengcheng, Dai Mingjiang, Shi Qian, Zhao Shengsheng. Effect of modulation structure on mechanical properties of Ti-TiN-Zr-ZrN multilayer films[J]. Rare Metal Materials and Engineering,2018,47(11):3468~3472.]
DOI：[doi]

復(fù)制
文章指標
  • 點擊次數(shù):
  • 下載次數(shù):
  • HTML閱讀次數(shù):
  • 引用次數(shù):
歷史
  • 收稿日期:2017-01-18
  • 最后修改日期:2017-02-10
  • 錄用日期:2017-02-20
  • 在線發(fā)布日期: 2018-12-19
  • 出版日期: