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不同調(diào)制結(jié)構(gòu)Ni/Al型納米多層膜的非對(duì)稱擴(kuò)散及界面應(yīng)力演化行為
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機(jī)械與材料工程學(xué)院,,機(jī)械與材料工程學(xué)院,機(jī)械與材料工程學(xué)院,機(jī)械與材料工程學(xué)院,機(jī)械與材料工程學(xué)院,機(jī)械與材料工程學(xué)院,機(jī)械與材料工程學(xué)院,機(jī)械與材料工程學(xué)院

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Asymmetric intermixing and the stress buildup in Ni/Al-typed nanomultilayer with different characteristic scales
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School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,State-key Lab for Mechanical Behavior of Materials,Xi′an Jiaotong University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an,School of Mechanical Material Engineering,Shaanxi Key Laboratory of Surface Engineering and Remanufacturing,Xi′an University,Xi′an

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    摘要:

    為了研究分析室溫下濺射沉積的金屬異質(zhì)結(jié)界面演化的尺度依賴性,制備了不同調(diào)制周期和Ni:Al調(diào)制比等特征結(jié)構(gòu)的Ni/Al型金屬納米多層膜。結(jié)合X射線衍射,多光束光學(xué)應(yīng)力傳感器(MOSS)實(shí)時(shí)薄膜曲率測(cè)量,研究了應(yīng)力演化行為,并在此基礎(chǔ)上分析推測(cè)納米多層膜在生長(zhǎng)過(guò)程中的界面特性。實(shí)驗(yàn)結(jié)果表明,由于各亞層內(nèi)各向異性納米晶結(jié)構(gòu),多層膜界面具有不對(duì)稱性,這是由于界面處Ni原子向Al晶格內(nèi)的不對(duì)稱擴(kuò)散行為所致。特別地,當(dāng)此類型多層膜具備最小調(diào)制周期和最低Ni:Al調(diào)制比這兩個(gè)特征參量時(shí),上述不對(duì)稱擴(kuò)散行為由于界面累積效應(yīng)變得更為加劇。

    Abstract:

    In order to detect scale-dependent interfacial evolution of metallic heterostructure during the deposition at room temperature, Ni/Al-typed nanomultilayers were prepared as a function of the periodicity and Ni:Al modulated ratio. Combined with X-ray diffraction, real-time plate curvature measurements by multi-beam optical stress sensor (MOSS) were employed to study the stress buildup so as to speculate interfacial characteristics during the growth process. Experimental results show that, with anisotropic nanocrystalline structure within the sub-layers, the multilayers possess of asymmetrical interfaces, which is a result of dissymmetrical diffusion of Ni to Al lattice near the interface. Specially, for the smallest periodicity with the lowest Ni:Al ratio, above asymmetric intermixing behaviors turns to be aggravated by a promotion effect.

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劉明霞,馬飛,暢庚榕,何斌鋒,付福興,葉芳霞,余歷軍,戴君,徐可為.不同調(diào)制結(jié)構(gòu)Ni/Al型納米多層膜的非對(duì)稱擴(kuò)散及界面應(yīng)力演化行為[J].稀有金屬材料與工程,2017,46(11):3222~3227.[Mingxia Liu, Fei Ma, Gengrong Chang, Binfeng He, Fuxing Fu, Fangxia Ye, Lijun Yu, Jun Dai, Kewei Xu. Asymmetric intermixing and the stress buildup in Ni/Al-typed nanomultilayer with different characteristic scales[J]. Rare Metal Materials and Engineering,2017,46(11):3222~3227.]
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  • 收稿日期:2017-02-18
  • 最后修改日期:2017-04-01
  • 錄用日期:2017-08-02
  • 在線發(fā)布日期: 2017-12-13
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