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基于多層結(jié)構(gòu)理論的三維納米多孔陽極氧化鋁實時擴孔機理研究
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西北大學(xué),西北大學(xué),西北大學(xué),中科院物理所,西北大學(xué),中科院物理所

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Real-time studying the mechanism of 3D pore-widening of nano-porours anodic alumina with a multilayer structure
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Northwest University,Northwest University,Northwest University,,,

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National Natural Science Foundation of China (61378083); International Cooperation Foundation of the National Science and Technology Major Project of the Ministry of Science and Technology of China(2011DFA12220); Major Research Plan of National Natural Science Foundation of China(91123030) Natural Science Foundation of Shaanxi Province of China(14JS106);Natural Science Basic Research Program of Shaanxi Province- Major Basic Research Project (2016ZDJC-15)

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    摘要:

    多孔陽極氧化鋁的孔徑大小及其均勻性可通過擴孔進(jìn)行改善。本文以3wt%磷酸作為刻蝕液,在實現(xiàn)PAA孔徑擴大的同時,我們詳細(xì)研究了三維狀況下孔徑形態(tài)的實時演變過程,發(fā)現(xiàn)PAA孔加寬在表面和截面兩個方向上同時進(jìn)行。在表面擴孔研究中,磷酸逐層蝕刻PAA內(nèi)壁多層結(jié)構(gòu),隨著擴孔時間的增加,擴孔速率不同。在截面研究中,當(dāng)擴孔時間達(dá)到某一定值,由于擴孔速率不同,PAA頂部的擴孔過程較底部的擴孔過程相對較早完成,隨后頂部擴孔速率逐漸降低,底部擴孔速率逐漸增加,當(dāng)擴孔完成時,形成均一性良好的理想圓形小孔。同時,我們研究發(fā)現(xiàn),過度增大擴孔時間,PAA基元結(jié)構(gòu)將被破壞,并由于高縱橫比形成納米線,隨后被刻蝕溶液腐蝕。這是首次通過實驗對PAA擴孔機理在截面方向的演化過程進(jìn)行研究。本文詳細(xì)闡明三維PAA的實時擴孔機制,結(jié)合多層結(jié)構(gòu)對機理進(jìn)一步解釋,對PAA薄膜的可控制備和擴孔機理的精準(zhǔn)研究是很有意義的。

    Abstract:

    The uniformity of the pore size and the morphology of nano-porous anodic alumina (nano-PAA) can be improved by a pore-widening process. In this paper, the evolution of the pore diameter and the morphology are investigated in details and in real time. Phosphoric acid solution was used to chemically enlarge the pores of a nano-PAA prepared with oxalic acid. The pore-widening is monitored by carrying out simultaneously both top-view and cross-section analyses. From the top-view analysis, the pore diameter results to be gradually enlarged with the increasing etching time. However, such enlarging rate varies with the multilayer structure of the pore wall. From the cross-section analysis, the pores wall of a multilayered amorphous compound result to be etched in a stage-by-stage mode until almost everything is etched away. The pore-widening procedure on the upper portion is completed earlier respect to the lower portion, after some time the pore-widening becomes uniform along the axial direction. If the etching is maintained, hexagonal pore walls are destroyed and split into ultrahigh aspect ratio nanowires due to the etching anisotropy, and finally completely dissolved. This is the first experimental report on the structural evolution details of alumina nano-pores upon etching, combining analyses in the depth direction with stereoscopic 3D imaging. Results clarify the pore-widening mechanism in 3D nano-PAA and can have important practical applications.

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巴漢卿,王凱歌,焦陽,金愛子,白晉濤,顧長志.基于多層結(jié)構(gòu)理論的三維納米多孔陽極氧化鋁實時擴孔機理研究[J].稀有金屬材料與工程,2017,46(6):1536~1542.[BaHanqing, WangKaige, Jiao Yang, Jin Aizi, Bai Jintao, Gu Changzhi. Real-time studying the mechanism of 3D pore-widening of nano-porours anodic alumina with a multilayer structure[J]. Rare Metal Materials and Engineering,2017,46(6):1536~1542.]
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  • 收稿日期:2017-01-03
  • 最后修改日期:2017-01-03
  • 錄用日期:2017-02-20
  • 在線發(fā)布日期: 2017-11-07
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