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成膜時(shí)外加穩(wěn)恒磁場(chǎng)對(duì)Fe-Ga-Al-Y磁致伸縮薄膜磁性能的影響
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福州大學(xué),福州大學(xué),福州大學(xué)

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The Natural Science Foundation of Fujian Province (No. 2014J01176),


Effect of Static magnetic field applied during deposition on magnetic properties of Fe-Ga-Al-Y magnetostrictive film
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    摘要:

    本文借助自行設(shè)計(jì)的磁場(chǎng)發(fā)生器,以鈹青銅為襯底,采用離子束濺射沉積法在不同穩(wěn)恒磁場(chǎng)環(huán)境下制備Fe-Ga-Al-Y MF樣品,其成分為Fe74.34-79.33Ga11.45-13.73Al5.33-6.95Y3.27-4.36。采用原子力顯微鏡(AFM)與掃描電鏡(SEM)觀測(cè)Fe-Ga-Al-Y MF表面形貌,通過(guò)激光微位移傳感器和交變梯度磁強(qiáng)計(jì)分別對(duì)薄膜樣品的懸臂梁自由端偏轉(zhuǎn)量與磁滯回線進(jìn)行測(cè)定,研究Fe-Ga-Al-Y MF表面形貌以及成膜時(shí)外加穩(wěn)恒磁場(chǎng)方向及大小對(duì)Fe-Ga-Al-Y MF磁性能的影響。研究結(jié)果表明：通過(guò)IBSD法制備的薄膜樣品表面光滑平整,無(wú)明顯的缺陷,薄膜組織結(jié)構(gòu)均勻致密,具有優(yōu)異的成膜質(zhì)量。成膜時(shí)施加的穩(wěn)恒磁場(chǎng)能調(diào)控薄膜的易磁化軸方向,Fe-Ga-Al-Y MF的易磁化軸方向與成膜時(shí)所施加的穩(wěn)恒磁場(chǎng)方向一致；成膜時(shí)施加與襯底短軸方向平行的穩(wěn)恒磁場(chǎng),可以顯著提高Fe-Ga-Al-Y MF的飽和磁致伸縮性能,且隨著磁場(chǎng)的增大,薄膜的飽和磁致伸縮性能逐漸增加。薄膜面內(nèi)(沿著x軸方向、y軸方向)的飽和磁化強(qiáng)度、矯頑力也隨著磁場(chǎng)的增大而逐漸增大。

    Abstract:

    With the help of self-designed magnetic field generator,beryllium bronze as the substrate, Fe-Ga-Al-Y MF samples were prepared under different static magnetic field environments by ion beam sputter deposition, its composition is Fe74.34-79.33Ga11.45-13.73Al5.33-6.95Y3.27-4.36 .The surface morphology of Fe-Ga-Al-Y MF was observed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Deflection of cantilever and hysteresis loop of films were measured by laser micro-displacement sensor and alternating gradient magnetometer, respectively. The surface morphology of Fe-Ga-Al-Y MF and the effect of the direction and size of the static magnetic field applied during deposition on magnetic properties of the films were studied．The results showed that the thin film samples prepared by IBSD method have smooth surface, no obvious defects, and the structure of the thin film is uniform and compact.The easy magnetization axis direction of films can be regulated by static magnetic field applied during film formation. The easy magnetization axis direction of Fe-Ga-Al-Y MF was the same to the direction of the static magnetic field applied during film formation. When the direction of static magnetic field applied during film formation was parallel to the minor axis direction of the substrate, it can significantly improve the saturation magnetostrictive properties of the Fe-Ga-Al-Y MF. With the increase of magnetic field, the saturation magnetostriction coefficient of film has been continuously improved and the saturation magnetization , coercive force of the films within the film plane (along the x-axis direction, y-axis direction) gradually increased .

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張魯鐘,周白楊,鄭運(yùn)相.成膜時(shí)外加穩(wěn)恒磁場(chǎng)對(duì)Fe-Ga-Al-Y磁致伸縮薄膜磁性能的影響[J].稀有金屬材料與工程,2018,47(8):2411~2416.[ZHANG Lu-zhong, ZHOU Bai-yang, ZHENG Yun-xiang. Effect of Static magnetic field applied during deposition on magnetic properties of Fe-Ga-Al-Y magnetostrictive film[J]. Rare Metal Materials and Engineering,2018,47(8):2411~2416.]
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  • 收稿日期:2016-09-27
  • 最后修改日期:2016-11-23
  • 錄用日期:2016-12-02
  • 在線發(fā)布日期: 2018-10-17
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