3: HF: H3PO4= 1: 1: 2,體積比)為適合的拋光試劑,拋光速率方程為h = 29.359 × t 0.9247,拋光6 ~ 15 min可移除厚度154 ~ 360 μm,表面粗糙度Ra小于0.65 μm,表面Nb2O5層厚度小于10 nm。同時,利用電子背散射電子衍射技術(shù)(EBSD)結(jié)合表面形貌討論了化學(xué)拋光機制,發(fā)現(xiàn)機加紋路消除后繼續(xù)延長拋光時間,晶粒內(nèi)高指數(shù)晶面(原子疏排面)會被優(yōu)先拋光,從而在晶界處形成較深的溝槽,在晶粒內(nèi)出現(xiàn)尖銳突起。"/>

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超導(dǎo)射頻腔用鈮材的表面化學(xué)拋光技術(shù)
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中國工程物理研究院,中國工程物理研究院,中國工程物理研究院,中國工程物理研究院,中國工程物理研究院,中國工程物理研究院

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TG175.3

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中國科學(xué)院先導(dǎo)專項基金資助(項目號XDA03020702)


Chemical Polishing of Niobium for Superconducting Radio Frequency Cavity
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China Academy of Engineering Physics,China Academy of Engineering Physics,China Academy of Engineering Physics,China Academy of Engineering Physics,China Academy of Engineering Physics,China Academy of Engineering Physics

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    摘要:

    高能粒子加速器的性能很大程度上依賴于超導(dǎo)射頻鈮腔的內(nèi)表面狀態(tài)。本文通過分析化學(xué)拋光過程中鈮材的拋光速率、表面形貌和氧化狀態(tài)等參數(shù),確定了超導(dǎo)腔用鈮材的表面化學(xué)拋光工藝：混合酸(HNO3: HF: H3PO4= 1: 1: 2,體積比)為適合的拋光試劑,拋光速率方程為h = 29.359 × t 0.9247,拋光6 ~ 15 min可移除厚度154 ~ 360 μm,表面粗糙度Ra小于0.65 μm,表面Nb2O5層厚度小于10 nm。同時,利用電子背散射電子衍射技術(shù)(EBSD)結(jié)合表面形貌討論了化學(xué)拋光機制,發(fā)現(xiàn)機加紋路消除后繼續(xù)延長拋光時間,晶粒內(nèi)高指數(shù)晶面(原子疏排面)會被優(yōu)先拋光,從而在晶界處形成較深的溝槽,在晶粒內(nèi)出現(xiàn)尖銳突起。

    Abstract:

    The performance of niobium superconducting radiofrequency (SRF) accelerator cavities strongly depends on its interior surface state. This paper describes the experimental characteristics of chemical polishing technology for niobium metal, namely polishing rate, surface topography, chemical composition and grain orientation, which have been conducted to optimize process parameters. The mixed solution of hydrofluoric acid, Nitric acid and prthoposphoric acid, 1: 1: 2 in parts by volume is proposed as appropriate polishing reagents with rate equation h = 29.359 × t 0.9247. Polishing for 6 ~ 15 min can remove 154 ~ 360 μm of material using this solution, corresponding roughness Ra and Nb2O5 layer thickness of polished surface is less than 0.65 μm and 10 nm respectively. Meanwhile, we discussed the polishing mechanism using electron back scatter diffration (EBSD) and laser scanning confocal microscope (LSCM), found that the outmost surface of over-polishing sample consists of many fine high-index planes which intersects each other to form sharp egdes in grains or at boundaries.

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陳向林,唐縣娥,法濤,鄒東利,白彬,蒙大橋.超導(dǎo)射頻腔用鈮材的表面化學(xué)拋光技術(shù)[J].稀有金屬材料與工程,2018,47(8):2472~2476.[Chen Xianglin, Tang Xian’e, Fa Tao, Zhou Dongli, Bai Bin, Meng Daqiao. Chemical Polishing of Niobium for Superconducting Radio Frequency Cavity[J]. Rare Metal Materials and Engineering,2018,47(8):2472~2476.]
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  • 收稿日期:2016-08-31
  • 最后修改日期:2016-10-26
  • 錄用日期:2016-11-11
  • 在線發(fā)布日期: 2018-10-17
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