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FeCrNiMoCu高熵合金涂層的多靶磁控共濺射制備及微結(jié)構(gòu)分析
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四川理工學(xué)院材料科學(xué)與工程學(xué)院,四川理工學(xué)院材料科學(xué)與工程學(xué)院,四川理工學(xué)院材料科學(xué)與工程學(xué)院,四川理工學(xué)院分析測試中心,四川理工學(xué)院材料科學(xué)與工程學(xué)院,四川理工學(xué)院材料科學(xué)與工程學(xué)院

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Preparation and Microstructure of FeCrNiMoCu high-entropy alloy coatings by magnetron co-sputtering
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Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,

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    摘要:

    本文采用多靶磁控共濺射技術(shù)的單靶功率可調(diào)特點,在304不銹鋼基體上,制備出了FeCrNiMoCu高熵合金涂層。通過納米壓入(Nanoindentation)、X射線衍射儀(XRD)、掃描電子顯微鏡(SEM)、原子力顯微鏡(AFM)等對不同組分含量的FeCrNiMoCu高熵合金涂層的納米硬度、微觀結(jié)構(gòu)及形貌進行了表征。結(jié)果表明：磁控共濺射法制備的FeCrNiMoCu涂層具有簡單的FCC結(jié)構(gòu)和高的納米硬度,表面硬度隨鐵元素含量上升而增加。

    Abstract:

    The FeCrNiMoCu high-entropy alloy coatings were prepared in 304 stainless steel by five- targets co-sputtering. Nano-indentation hardness, microstructure and morphology of the as-deposited coating were investigated using Nano indentation, X-ray diffraction ( XRD), atom force microscopy(AFM) and scanning electron microscopy ( SEM). The obtained results indicate that the coatings have simple FCC solid solution and high hardness, and coating surface hardness increase with Fe content.

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劉春海,蒲國,顏成杰,張偉,崔學(xué)軍,金永中. FeCrNiMoCu高熵合金涂層的多靶磁控共濺射制備及微結(jié)構(gòu)分析[J].稀有金屬材料與工程,2018,47(5):1578~1582.[LIU Chunhai, PU Guo, YAN Chengjie, ZHANG Wei, CUI Xuejun, JING Yongzhong. Preparation and Microstructure of FeCrNiMoCu high-entropy alloy coatings by magnetron co-sputtering[J]. Rare Metal Materials and Engineering,2018,47(5):1578~1582.]
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  • 收稿日期:2016-04-19
  • 最后修改日期:2016-08-14
  • 錄用日期:2016-10-18
  • 在線發(fā)布日期: 2018-06-08
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