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多層結(jié)構(gòu)對Ti/TiN涂層性能的影響
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西安建筑科技大學(xué),西北有色金屬研究院腐蝕與防護(hù)研究所

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科技部國際合作項(xiàng)目,2014DFR50450;國家重點(diǎn)基礎(chǔ)研究發(fā)展計(jì)劃項(xiàng)目,2012CB625100


Effect of multilayered structure on the properties of Ti/TiN coating
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National International Science and Technology Corporation (2014DFR50450), National Basic Research Program of China (2012CB625100)

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    摘要:

    以TiN、TiAlN為主的過渡族金屬氮化物硬質(zhì)涂層以其較高的表面硬度、良好的耐磨以及抗高溫氧化性能,被廣泛應(yīng)用于材料表面防護(hù)涂層。然而,涂層內(nèi)部積聚的高內(nèi)應(yīng)力卻容易易引發(fā)起涂層與基體的結(jié)合力問題。利用PVD技術(shù)很難在材料表面制備出厚度超過10微米的TiN或TiAlN涂層。多層復(fù)合結(jié)構(gòu)能夠有效控制涂層中的應(yīng)力分布,從而使得其成為獲得較厚硬質(zhì)涂層的一種有效方法。本文在TC4合金以及Si(100)基體上利用等離子增強(qiáng)離子鍍技術(shù)制備了具有不同復(fù)合層數(shù)的多層Ti/TiN涂層,并研究了復(fù)合層數(shù)對涂層力學(xué)性能的影響。結(jié)果表明,隨著復(fù)合層數(shù)的增加,涂層的各項(xiàng)力學(xué)性能得到了顯著強(qiáng)化。涂層的顯微硬度高達(dá)2750HV,厚度大于50微米,且具有較好的韌性。涂層的韌性與顯微硬度成正比例關(guān)系。同時,48層復(fù)合結(jié)構(gòu)的Ti/TiN涂層具有低于0.35的摩擦系數(shù)以及最佳的抗磨損性能。然而,隨著復(fù)合層數(shù)的進(jìn)一步增加,涂層與基體的界面顯著弱化了涂層的結(jié)合強(qiáng)度。

    Abstract:

    Metal nitride hard coatings, such as TiN and TiAlN, were widely used to protect materials because of their higher hardness and wearing properties. However, these coatings always contain a high degree of internal stress which could arouse adhesion problems. It’s hard to synthesize monolayer TiN or TiAlN coatings thicker than 10μm by PVD method. The multilayer composite structure, offering an efficient way of controlling residual stress, is an effective way to synthesize thicker hard coatings. In this study, a series of multilayer composite Ti/TiN coatings with different composite periods were synthesized by plasma enhanced ion plating and how the multilayered structure affects the coating’s mechanical properties was studied in detail. The result shows that the coating’s mechanical properties are strengthened as increasing the periods of composite Ti/TiN layer. The micro hardness can reach to about 2750HV0.25 albeit possessing better toughness and higher thickness (i.e.>50?m). The coating’s toughness is almost direct proportional to hardness. And also the coating’s tribological performance is improved with a lower dry friction coefficient (about 0.35) and higher wearing resistance by alternating 48 periods of Ti/TiN layer. However, the coating’s bonding strength is weakened as increasing the period of Ti/TiN layer blindly due to the weak interface of coating and substrate.

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王彥峰,李爭顯.多層結(jié)構(gòu)對Ti/TiN涂層性能的影響[J].稀有金屬材料與工程,2017,46(5):1219~1224.[Wang Yanfeng, Li Zhengxian. Effect of multilayered structure on the properties of Ti/TiN coating[J]. Rare Metal Materials and Engineering,2017,46(5):1219~1224.]
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  • 收稿日期:2016-04-14
  • 最后修改日期:2016-09-27
  • 錄用日期:2016-10-18
  • 在線發(fā)布日期: 2017-09-27
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