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SEM-EDS Plane Scan and Line Scan Analysis of TiCN Coatings by Cathodic Arc Ion Plating
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SEM-EDS Plane Scan and Line Scan Analysis of TiCN Coatings by Cathodic Arc Ion Plating
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The Science and Technology Support Project of Jiangsu Province, China (BE2014818)

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    摘要:

    采用陰極弧離子鍍在Cr12MoV冷作模具鋼表面制備了TiCN涂層，通過掃描電鏡(SEM)和能譜儀(EDS)分析了涂層表面化學(xué)元素的面分布和界面化學(xué)元素的線分布。討論了涂層界面結(jié)合機理，用劃痕法對結(jié)合強度進行了表征分析。結(jié)果表明，涂層主要是由TiN、TiC和C原子組成，其中TiN和TiC提高了涂層硬度，C原子改善了涂層摩擦潤滑性能；涂層中N原子分數(shù)超過C原子分數(shù)，界面結(jié)合處發(fā)生了相互擴散，涂層中C原子擴散量最大，基體中Si原子擴散量最大，涂層與基體形成了冶金結(jié)合，利用劃痕法測定TiCN涂層結(jié)合強度為79.6 N

    Abstract:

    A TiCN coating was deposited on Cr12MoV cold worked die steel by cathodic arc ion plating (CAIP). The plane distributions of chemical elements and the line scans of chemical elements at the coating interface were analyzed by SEM (scanning electron microscopy) and EDS (energy dispersive spectroscopy). The interface bonding mechanism was discussed, and the interface bonding of the coating was characterized and analyzed with scratch tester. The results show that the TiCN coating is composed of TiN, TiC and C atom, of which the TiC and TiN increase the coating hardness, and the C atom improves the friction lubrication properties of the coating. The number of N atoms in the coating is higher than that of C atoms, and the mutual diffusions occur at the bonding interface between the coating and the substrate. The C atoms diffuse to the substrate more than other atoms of elements in the coating, so Si atoms in the substrate, and a metallurgical bonding is formed between the coating and the substrate, its bonding with strength of 79.6 N

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孔德軍,王進春,郭皓元,王文昌. SEM-EDS Plane Scan and Line Scan Analysis of TiCN Coatings by Cathodic Arc Ion Plating[J].稀有金屬材料與工程,2015,44(12):3000~3004.[Kong Dejun, Wang Jinchun, Guo Haoyuan, Wang Wenchang. SEM-EDS Plane Scan and Line Scan Analysis of TiCN Coatings by Cathodic Arc Ion Plating[J]. Rare Metal Materials and Engineering,2015,44(12):3000~3004.]
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  • 收稿日期:2014-12-19
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  • 在線發(fā)布日期: 2016-08-29
  • 出版日期: 2015-12-25