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Cu靶功率和襯底溫度對(duì)Cu-SiO2納米復(fù)合膜的相結(jié)構(gòu)與光吸收性能影響
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陜西省自然科學(xué)基金 (2010JQ6008); 國(guó)家自然科學(xué)基金 (51202191, 51171148); 陜西省重點(diǎn)學(xué)科建設(shè)專項(xiàng)資金


Effects of Cu Target Power and Substrate Temperature on Phase Structure and Optical Absorption Properties of Cu-SiO2 Nano-Composite Films
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    摘要:

    實(shí)驗(yàn)利用直流和射頻磁控濺射方法交替沉積Cu-SiO2納米復(fù)合膜,研究不同Cu靶功率和襯底溫度對(duì)納米復(fù)合膜的相結(jié)構(gòu)和光吸收性能的影響。結(jié)果表明:隨著Cu靶功率的增加,金屬Cu納米顆粒尺寸增大,導(dǎo)致光吸收峰峰位發(fā)生紅移;隨著襯底溫度的升高,由于Cu再蒸發(fā)效應(yīng)致使金屬Cu納米顆粒尺寸減小,引起光吸收峰峰位發(fā)生藍(lán)移;與室溫下沉積態(tài)Cu-SiO2納米復(fù)合膜相比,在襯底加熱條件下沉積的納米復(fù)合膜在可見(jiàn)光波段出現(xiàn)了明顯的表面等離子體共振吸收峰。因此,Cu靶功率和襯底溫度對(duì)Cu-SiO2納米復(fù)合薄膜的結(jié)晶狀況和光吸收性能有顯著影響

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    The Cu-SiO2 nano-composite thin films with different Cu target powers and substrate temperatures were prepared by DC and RF magnetron sputtering in an alternating deposition method. The phase structure and optical absorption properties of Cu-SiO2 nano-composite films were studied. The results indicate that with the increase of the Cu target power, the size of the Cu nanoparticles increases, and the peak in the optical absorption spectra presents a red-shift. Due to the re-evaporation effect, the size of Cu nanoparticles decreases and the peak exhibits a blue-shift with increasing of the substrate temperature. Compared with the films deposited at RT, the films at different substrate temperatures display a clear surface plasmon resonance absorption peak in the visible band. Therefore, the Cu target power and the substrate temperature significantly influence the crystallization states and optical absorption properties of the Cu-SiO2 nano-composite films

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趙志明,邢少敏,張國(guó)君,白力靜. Cu靶功率和襯底溫度對(duì)Cu-SiO2納米復(fù)合膜的相結(jié)構(gòu)與光吸收性能影響[J].稀有金屬材料與工程,2015,44(10):2539~2543.[Zhao Zhiming, Xing Shaomin, Zhang Guojun, Bai Lijing. Effects of Cu Target Power and Substrate Temperature on Phase Structure and Optical Absorption Properties of Cu-SiO2 Nano-Composite Films[J]. Rare Metal Materials and Engineering,2015,44(10):2539~2543.]
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  • 收稿日期:2014-10-12
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  • 在線發(fā)布日期: 2016-07-13
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