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Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method
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Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method
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    摘要:

    采用溫度梯度法，通過MW-ECR射頻磁控濺射在硅片基底上制備了六方和立方混合的氮化硼薄膜。研究了薄膜的鍵結構，化學成分和力學性能。結果顯示，對于氮化硼立方相的出現(xiàn)存在溫度閾值，薄膜的硬度隨沉積溫度提高而提高。相對于傳統(tǒng)薄膜制備方法，溫度梯度方法具有更高的效率。

    Abstract:

    Adopting a gradient temperature method, hexagonal-cubic mixed boron nitride films were synthesized by MW-ECR radio frequency (RF) magnetron sputtering. The binding structure, the chemical composition, and the mechanical property of the films were investigated. The results show that there is a temperature threshold of the appearance of cubic BN film, and the hardness of the film increases with the increase of deposition temperature. Compared to the conventional methods the gradient temperature method is more efficient.

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王明娥,鞏水利,馬國佳,劉 星,張 林,王達望,陸文琪,董 闖. Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method[J].稀有金屬材料與工程,2015,44(5):1108~1111.[Wang Ming’e, Gong Shuili, Ma Guojia, Liu Xing, Zhang Lin, Wang Dawang, Lu Wenqi, Dong Chuang. Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method[J]. Rare Metal Materials and Engineering,2015,44(5):1108~1111.]
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  • 收稿日期:2014-05-15
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  • 在線發(fā)布日期: 2015-06-08
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