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SiC顆粒表面Mo涂層的制備與分析
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國防科學(xué)技術(shù)大學(xué)航天科學(xué)與工程學(xué)院,國防科學(xué)技術(shù)大學(xué)航天科學(xué)與工程學(xué)院,國防科學(xué)技術(shù)大學(xué)航天科學(xué)與工程學(xué)院,國防科學(xué)技術(shù)大學(xué)航天科學(xué)與工程學(xué)院,國防科學(xué)技術(shù)大學(xué)航天科學(xué)與工程學(xué)院

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Preparation and analysis of molybdenum coating on the surface of silicon carbide
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College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073

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    摘要:

    采用磁控濺射法在碳化硅(SiC)顆粒表面成功制備了金屬鉬(Mo)涂層,分析了Mo涂層的成分和形貌;為了改善初始涂層成分和形貌,對鍍Mo改性SiC復(fù)合粉體進行了不同工藝的結(jié)晶化熱處理,重點研究了熱處理對SiC顆粒表面Mo涂層形貌和成分的影響。結(jié)果表明,磁控濺射法能夠在SiC顆粒表面沉積Mo涂層,隨磁控濺射時間的延長,SiC顆粒表面Mo涂層的粗糙度增大,但磁控濺射后SiC顆粒表面Mo涂層為非晶態(tài)。熱處理能夠有效改善SiC顆粒表面Mo涂層的成分、形貌及結(jié)晶狀態(tài),在600℃——1200℃之間結(jié)晶化熱處理過程中,隨熱處理溫度的升高,SiC顆粒表面Mo涂層形貌主要經(jīng)歷了以下四個階段變化:涂層初步致密化——Mo的結(jié)晶致密化——Mo涂層顆粒的聚集長大——Mo與SiC之間發(fā)生化學(xué)反應(yīng);相應(yīng)的Mo原子的存在狀態(tài)也經(jīng)歷了如下變化:非晶態(tài)的Mo原子——結(jié)晶Mo原子——二鉬化碳和硅化鉬。其中800℃——900℃之間為最佳熱處理溫度,此時Mo涂層致密均勻包覆完整。SiC表面連續(xù)均勻致密的Mo涂層,有利于改善SiC顆粒增強金屬基復(fù)合材料中基體與增強體之間的界面結(jié)合并控制不利界面反應(yīng),有利于復(fù)合材料綜合性能的提高,必將擴大SiC顆粒作為增強體的應(yīng)用范圍。

    Abstract:

    The molybdenum coating was successfully deposited on the surface of silicon carbide by magnetron sputtering method, its surface morphology and chemical composition were analyzed. In order to ameliorate the surface morphology and the state of molybdenum coating, different kinds of crystallized heat-treatment were carried out. The evolution of the surface morphology and chemical composition of the molybdenum coating were investigated in detail and the results are as follows: The molybdenum coating can be successfully deposited on the surface of silicon carbide by magnetron sputtering method, with the sputter time postponed the roughness and the thickness of the coating was enhanced, and furthermore the molybdenum on the surface was in amorphous state. During the crystallized heat-treatment process, the morphology evolution of the molybdenum coating was as follows: the primary densification phase, the compactly crystallization of molybdenum atoms, the dispersive accumulation of molybdenum coating, the reaction between molybdenum and silicon carbide. The state evolution of molybdenum atoms was as follows: amorphous molybdenum, crystalline molybdenum, molybdenum compound (Mo2C and MoSi2). And the best heat treated temperature range is about 800℃-900℃. It is believed that the uniform and compactly Mo coating will broaden the application filed of SiC particles as the reinforcement in metal matrix composites especially have advantaged in control the interfacial reaction and improve interface bonding force in metal matrix composite.

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劉猛,白書欣,李順,趙恂,熊德贛. SiC顆粒表面Mo涂層的制備與分析[J].稀有金屬材料與工程,2016,45(4):1072~1077.[Liu Meng, Bai Shuxin, Li Shun, Zhao Xun, Xiong Degan. Preparation and analysis of molybdenum coating on the surface of silicon carbide[J]. Rare Metal Materials and Engineering,2016,45(4):1072~1077.]
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  • 收稿日期:2015-05-05
  • 最后修改日期:2015-07-23
  • 錄用日期:2015-10-13
  • 在線發(fā)布日期: 2016-06-01
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